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US 10,121,627 B1Granted
Ion pump noble gas stability using small grain sized cathode material
AssigneeEdwards Vacuum LLC
InventorAnthony Wynohrad
Life of this patent
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Abstract
A method includes assessing a plurality of Titanium plates to determine a grain size for each plate and removing all Titanium plates with an average grain size that is larger than a threshold size from the plurality of Titanium plates. One of the Titanium plates remaining in the plurality of Titanium plates after the removing step is then used to form a cathode for an ion pump.
Claims18
A method comprising:
- assessing a plurality of titanium plates to determine a grain size for each plate;
- removing all titanium plates with an average grain size that is larger than a threshold size from the plurality of titanium plates;
- using one of the titanium plates remaining in the plurality of titanium plates after the removing step to form a cathode for an ion pump.
A method comprising:
- requiring that a cathode plate have an average grain size that is smaller than a threshold size;
- and
- constructing an ion pump from the cathode plate.
A method comprising:
- setting a maximum average grain size for a cathode plate in an ion pump;
- and
- building the ion pump using a cathode plate that has an average grain size that is less than or equal to the maximum grain size.
Dependencies are inferred from the claim text.