Dielectric thin film and electronic component
AssigneeTDK Corporation
InventorsMaiko Shirokawa, Raitarou Masaoka, Hiroki Uchiyama, Shohei Fujii
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AssigneeTDK Corporation
InventorsMaiko Shirokawa, Raitarou Masaoka, Hiroki Uchiyama, Shohei Fujii
Estimating the term…
A dielectric thin film containing MgO as a main component, wherein the dielectric thin film is composed of a columnar structure group containing at least one columnar structure A constructed by single crystal and at least one columnar structure B constructed by polycrystal, respectively, and in the cross section of the direction perpendicular to the dielectric thin film, when the area occupied by the columnar structure A is set as CA and the area occupied by the columnar structure B is set as CB, the relationship between CA and CB satisfies 0.4≤CB/CA≤1.1.
A dielectric thin film comprising MgO as a main component, wherein
Dependencies are inferred from the claim text.