Measurement apparatus that obtains information of a shape of a surface using a corrected image and measurement method

A method of measuring a shape of a surface to be measured, the method comprising:

• illuminating the surface with first light having a first wavelength having a light intensity distribution in a pattern shape while illuminating, with second light having a second wavelength different from the first wavelength, a region of the surface which is wider than an illumination region illuminated with the first light, and thereby obtaining a first image of the first wavelength and a second image of the second wavelength of the surface;
• correcting the first image based on the second image;
• and
• obtaining information of the shape of the surface by using the corrected first image.

A measurement apparatus that obtains information of a shape of a surface to be measured, the apparatus comprising:

• a first illumination unit configured to illuminate the surface with first light having a first wavelength having a light intensity distribution in a pattern shape;
• a second illumination unit configured to illuminate, with second light having a second wavelength different from the first wavelength, a region of the surface;
• an image sensing unit configured to sense an image of the surface;
• and
• a processor configured to obtain information of the shape of the surface by processing the image of the surface output from the image sensing unit,
• wherein the image sensing unit is configured to simultaneously sense a first image by using the first illumination unit and a second image by using the second illumination unit.