Method of performing metrology operations and system thereof

A computerized system of performing metrology operations on at least one representation of a specimen, the system comprising a processing circuitry that comprises a processor and a memory operatively coupled thereto, wherein:

• the memory is configured to:
• store definitions of one or more metrology objects and one or more metrology operations, wherein at least one of the group consisting of the one or more metrology objects and the one or more metrology operations is defined with reference to design data;
• and
• store a representation group comprising a design-based representation of the specimen and an image-based representation of the specimen;
• wherein the design-based representation of the specimen comprises design-based representation of at least first metrology object of the one or more metrology objects and the image-based representation of the specimen comprises image-based representation of the at least first metrology object of the one or more metrology objects, and wherein the one or more metrology operations include at least first metrology operation, the at least first metrology operation being defined to be related to the at least first metrology object and to be performed on at least the image-based representation of the specimen;
• and
• the processor is configured to:
• map between the design-based representation of the at least first metrology object and the image-based representation of the at least first metrology object;
• and
• perform the at least first metrology operation according to definition of the at least first metrology operation using the mapping.

A non-transitory computer readable storage medium tangibly embodying a program of instructions that, when executed by a computer, cause the computer to perform metrology operations on at least one representation of a specimen, the metrology operations comprising:

• accommodating, in the memory, definitions of one or more metrology objects and one or more metrology operations, wherein at least one of the group consisting of the one or more metrology objects and the one or more metrology operations is defined with reference to design data;
• accommodating, in the memory, a representation group comprising a design-based representation of the specimen and an image-based representation of the specimen;
• wherein the design-based representation of the specimen comprises design-based representation of at least first metrology object of the one or more metrology objects and the image-based representation of the specimen comprises image-based representation of the at least first metrology object of the one or more metrology objects, and wherein the one or more metrology operations include at least first metrology operation, the at least first metrology operation being defined to be related to the at least first metrology object and to be performed on at least the image-based representation of the specimen;
• mapping, by the computer, between the design-based representation of the at least first metrology object and the image-based representation of the at least first metrology object;
• and
• performing, by the computer, the at least first metrology operation according to definition of the at least first metrology operation using the mapping.