Capacitive pressure sensor and method for the same
AssigneeSuperc-Touch Corporation
InventorsHsiang-Yu Lee, Shang Chin, Ping-Tsun Lin
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Abstract
A capacitive pressure sensor includes an upper substrate having a first face and a second face opposite to the first face, a first electrode layer with a plurality of first sensing electrodes, a second electrode layer having at least one second sensing electrode, a dielectric layer arranged between the first and the second electrode layers, and a capacitance sensing circuit. In pressure sensing operation, the capacitance sensing circuit sends a capacitance-exciting signal to the at least one second sensing electrode and obtains a pressure sensing signal from the second sensing electrode.
Claims17
A capacitive pressure sensor comprising:
- an upper substrate having a first face and a second face opposite to the first face;
- a first electrode layer arranged on the second face and having a plurality of first sensing electrodes;
- a second electrode layer having at least one second sensing electrode, the first electrode layer placed between the upper substrate and the second electrode layer;
- a dielectric layer arranged between the first electrode layer and the second electrode layer;
- and
- a capacitance sensing circuit configured to send a capacitance-exciting signal to the at least one second sensing electrode and obtain a pressure sensing signal from the second sensing electrode, thus performing pressure sensing,
- wherein the capacitance sensing circuit is configured to send, sequentially or randomly, a counter-exciting signal to at least one chosen first sensing electrode, the chosen first sensing electrode corresponding to the at least one second sensing electrode.
A method for performing a capacitive pressure sensing, comprising:
- providing a capacitive pressure sensor comprising:
- an upper substrate having a first electrode layer on a face of the upper substrate and having a plurality of first sensing electrodes;
- a second electrode layer having at least one second sensing electrode, and a dielectric layer arranged between the first electrode layer and the second electrode layer, the dielectric layer compressively deformed under pressure and restoring to original shape and volume if pressure is not present, and a capacitance sensing circuit;
- sending a capacitance-exciting signal to the at least one second sensing electrode and obtaining a pressure sensing signal from the second sensing electrode, thus performing pressure sensing;
- and
- sequentially or randomly sending a counter-exciting signal to at least one chosen first sensing electrode, the chosen first sensing electrode corresponding to the at least one second sensing electrode.
Dependencies are inferred from the claim text.