Event processing based system for manufacturing yield improvement
AssigneeApplied Materials, Inc.
InventorsJamini Samantaray, John Scoville
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AssigneeApplied Materials, Inc.
InventorsJamini Samantaray, John Scoville
Estimating the term…
An event processing system identifies a process event associated with an identified defect in a manufacturing process. The event processing system selects a plurality of data elements from a manufacturing data source based on the process event. The manufacturing data source is associated with the manufacturing process during execution of the manufacturing process. During execution of the manufacturing process, the event processing system applies an event rule to the plurality of data elements to determine whether the event rule is satisfied. During execution of the manufacturing process, the event processing system performs a predefined action upon determining that the event rule is satisfied and selects additional data elements from the manufacturing data source upon determining that the event rule is not satisfied.
A method comprising:
A non-transitory computer-readable storage medium having instructions encoded thereon that, when executed by a processing device, cause the processing device to perform operations comprising:
A system comprising:
Dependencies are inferred from the claim text.