Fluid handling structure, immersion lithographic apparatus, and device manufacturing method

A fluid handling structure for use in an immersion lithographic apparatus, wherein the fluid handling structure is configured to provide an immersion fluid to a space between a final element of a projection system and an opposing surface that is moveable relative to the final element of the projection system, the fluid handling structure comprising:

• a fluid extraction conduit configured to conduct a used fluid away from the space, wherein the fluid extraction conduit comprises a recovery port configured to receive the fluid into the conduit, a first length of conduit downstream from the recovery port and a second length of conduit downstream from the first length of conduit;
• the second length of conduit comprises a flow breaker extending across at least a portion of the conduit;
• the first length of conduit is elongate when viewed in at least one direction perpendicular to an average flow direction in the conduit when used fluid flows in the conduit;
• and
• at all positions in the first length of conduit the cross-sectional area of the conduit, perpendicular to the average flow direction, is equal to or greater than the cross-sectional area of the conduit at the upstream end of the first length of conduit.

A device manufacturing method, comprising:

• using a projection system to project a patterned radiation beam onto a substrate through an immersion fluid;
• providing the immersion fluid to a space between (i) a final element of the projection system and (ii) the substrate or a support that is supporting the substrate;
• and
• using a fluid extraction conduit to conduct a used fluid away from the space, wherein the fluid extraction conduit comprises a recovery port configured to receive the used fluid into the conduit, a plurality of flow breakers that each extend across at least a portion of the conduit and a peripheral wall configured to contain the fluid peripherally within the conduit;
• the flow breakers are positioned downstream of the recovery port;
• the flow breakers are arranged so that a common plane cuts through at least a portion of two or more of the flow breakers;
• the common plane is aligned so as to be perpendicular to an average direction of flow in the conduit at the position of the common plane;
• and
• at least one of the two or more flow breakers having a portion in the common plane is a discrete element with the only connection between the flow breaker and any other of the two or more flow breakers having a portion in the common plane being made via the peripheral wall.

A device manufacturing method, comprising:

• using a projection system to project a patterned radiation beam onto a substrate through an immersion fluid;
• providing the immersion fluid to a space between (i) a final element of the projection system and (ii) the substrate or a support that is supporting the substrate;
• and
• using a fluid extraction conduit to conduct a used fluid away from the space, wherein the fluid extraction conduit comprises a recovery port configured to receive the fluid into the conduit, a first length of conduit downstream from the recovery port and a second length of conduit downstream from the first length of conduit;
• the second length of conduit comprises a flow breaker extending across at least a portion of the conduit;
• the first length of conduit is elongate when viewed in at least one direction perpendicular to an average flow direction in the conduit of the used fluid;
• and
• at all positions in the first length of conduit the cross-sectional area of the conduit, perpendicular to the average flow direction, is equal to or greater than the cross-sectional area of the conduit at the upstream end of the first length of conduit.