Illumination method, illumination optical device, and exposure device

An illumination optical apparatus for illuminating an illumination objective surface by using a light from a light source, the illumination optical apparatus comprising:

• a spatial light modulator which is arranged in an optical path for the light from the light source and which has a plurality of optical elements capable of controlling a state of an incident light coming into each of the plurality of optical elements;
• a monitor unit which monitors time-integrated energy of the light from the light source;
• and
• a control system which sets a control amount for controlling the plurality of optical elements, to control the state of the incident light, and which corrects the control amount based on the time-integrated energy monitored by the monitor unit.

An illumination method for illuminating an illumination objective surface by using a light from a light source, the illumination method comprising:

• setting a posture control amount for a plurality of optical elements which are arranged in parallel and a posture of each of which is changeable;
• measuring an energy of the light propagating from the light source to the illumination objective surface;
• and
• changing the posture control amount for the plurality of optical elements so as to reduce posture changes of the plurality of optical elements by using an information related to the measured energy of the light,
• wherein the measured energy of the light indirectly corresponds to an average temperature of the plurality of optical elements.

An illumination optical apparatus for illuminating an illumination objective surface by using a light from a light source, the illumination optical apparatus comprising:

• a spatial light modulator having a plurality of optical elements which are arranged in parallel and a posture of each of which is changeable;
• a sensor which measures an energy of the light propagating from the light source to the illumination objective surface;
• and
• a controller which controls the spatial light modulator,
• wherein the controller performs:
• setting a posture control amount for the plurality of optical elements;
• and
• changing the posture control amount for the plurality of optical elements so as to reduce posture changes of the plurality of optical elements by using an information related to the measured energy of the light, and
• wherein the measured energy of the light indirectly corresponds to an average temperature of the plurality of optical elements.