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US 10,120,279 B2Granted
Negative resist composition and resist pattern forming process
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsKeiichi Masunaga, Satoshi Watanabe, Masaaki Kotake, Kenji Yamada, Masaki Ohashi
Life of this patent
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Abstract
A negative resist composition comprising (A) a sulfonium compound of betaine type and (B) a polymer is provided. The resist composition is effective for controlling acid diffusion during the exposure step, exhibits a very high resolution during pattern formation, and forms a pattern with minimal LER.
Claims13
A negative resist composition comprising
- (A) a sulfonium compound having the formula (A):
- wherein R1, R2 and R3 are each independently a C1-C20 straight, branched or cyclic monovalent hydrocarbon group which may contain a heteroatom, p and q are each independently an integer of 0 to 5, r is an integer of 0 to 4, in case of p=2 to 5, two adjoining groups R1 may bond together to form a ring with the carbon atoms to which they are attached, in case of q=2 to 5, two adjoining groups R2 may bond together to form a ring with the carbon atoms to which they are attached, and in case of r=2 to 4, two adjoining groups R3 may bond together to form a ring with the carbon atoms to which they are attached, and
- (B) a base polymer containing a polymer comprising recurring units having the formula (B1):
- wherein RA is hydrogen, fluorine, methyl or trifluoromethyl, R11 is each independently halogen, an optionally halogenated C2-C8 straight, branched or cyclic acyloxy group, optionally halogenated C1-C6 straight, branched or cyclic alkyl group, or optionally halogenated C1-C6 straight, branched or cyclic alkoxy group, A1 is a single bond or a C1-C10 straight, branched or cyclic alkylene group in which an ether bond may intervene in a carbon-carbon bond, s is 0 or 1, w is an integer of 0 to 2, a is an integer in the range:
- 0≤a≤5+2w−b, and b is an integer of 1 to 3.
2 more elements
Dependencies are inferred from the claim text.