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US 10,120,262 B2Granted
Power-scalable nonlinear optical wavelength converter
AssigneeKLA-Tencor Corporation
InventorDirk Woll
Life of this patent
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Abstract
A system includes a nonlinear crystal positioned such that a focus of a laser beam is outside the nonlinear crystal in at least one plane perpendicular to a beam propagation direction of the laser beam. The nonlinear crystal is disposed in a crystal mount assembly. A laser beam may be directed at the nonlinear crystal for wavelength conversion. The system may be used as a deep-UV wavelength converter.
Claims14
A method comprising:
- generating a laser beam;
- directing the laser beam at a nonlinear crystal configured for wavelength conversion, wherein the nonlinear crystal is positioned such that a focus of the laser beam is outside the nonlinear crystal in at least one plane perpendicular to a beam propagation direction of the laser beam, wherein the nonlinear crystal is disposed on a crystal mount assembly, wherein the crystal mount assembly provides an angle stability of greater than 0% and less than or equal to 27% of an angular acceptance range during operation, wherein the crystal mount assembly includes a plurality of mounting features at different distances from a laser source in the beam propagation direction, wherein each of the mounting features includes a hole that the crystal mount assembly is fastened into, and wherein a beam size of the laser beam in the nonlinear crystal is provided by selecting one of the mounting features;
- and
- nonlinearly converting the laser beam from a first wavelength to a second wavelength with the nonlinear crystal.
1 more element
Dependencies are inferred from the claim text.