US 10,120,215 B2Granted

Apparatus for carrying substrate by off-line vacuum suction and method for transporting substrate

AssigneesBoe Technology Group Co., Ltd., Hefei Boe Optoelectronics Technology Co., Ltd.

InventorsXu Shi, Zhilong Xu, Jun Liu, Xiaojun Wang, Dongqing Li, Shutong Huang, Wei Chen, Lei Zhang

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Abstract

Embodiments of the present application provide an apparatus for carrying a substrate by an off-line vacuum suction and a method for transporting a substrate. The apparatus includes a carrying frame provided with a clamper, a vacuum suction device and a detaching device arranged on the carrying frame, wherein the vacuum suction device is arranged to suck and fix a substrate and is connectable to and detachable from a vacuum pipeline and the detaching device is arranged to detach the vacuum suction device and the vacuum pipeline from each other while keeping the vacuum suction device to continuously suck the substrate to be transported. The apparatus and the method can improve fixing of the substrate and achieve off-line suction to the substrate.

Claims12

Dependent claims

An apparatus for carrying a substrate by an off-line vacuum suction, comprising a carrying frame provided with a clamper, a vacuum suction device and a detaching device arranged on the carrying frame, wherein the vacuum suction device is arranged to suck and fix the substrate and is connectable to and detachable from a vacuum pipeline, and the detaching device is arranged to detach the vacuum suction device and the vacuum pipeline from each other while keeping the vacuum suction device to continuously suck the substrate to be transported,

wherein the vacuum suction device comprises a suction holder fixed on a side of the carrying frame and comprising a plurality of pipes in communication with each other, and a plurality of vacuum suction heads in communication with the pipes are provided on the suction holder, the vacuum pipeline being communicated with the pipes, and
wherein the vacuum suction heads each comprise a sucking disc and a gas suction duct, and the gas suction duct has one end in communication with the sucking disc and the other end in communication with the pipes, and
wherein the sucking discs of the plurality of the suction heads have suction faces located in a same plane and each of the suction faces is arranged in the carrying frame.

Dependencies are inferred from the claim text.

Facts

Application: 15/517,660Filed 15 Oct 2015
Priority: CN 2015 1 035509324 Jun 2015
Published: US 2017/0307912 A126 Oct 2017
Granted: 6 Nov 2018
Term ends: Not estimatedThe source records don’t support an estimate.

Classification13 codes

G02F 1/13
For the control of the intensity, phase, polarisation or colour: based on liquid crystals, e.g. single liquid crystal display cells
B65G 47/91
Devices for picking-up and depositing articles or materials: incorporating pneumatic, e.g. suction, grippers
B65G 49/061
For fragile sheets, e.g. glass: lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction…
H10P 72/18
Using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]: characterised by being specially adapted for supporting a…

Family

US 2017/0307912 A1Pre-grant publication · published 26 Oct 2017
US 10,120,215 B2This patent

From the US filing history. Foreign family members aren’t listed.

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