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US 10,120,186 B2Granted
Scanning mirror
AssigneeDisco Corporation
InventorYu Kudo
Life of this patent
Estimating the term…
Abstract
A scanning mirror includes a mirror base and a reflective film formed on the mirror base. The mirror base is formed from a non-metallic material having a specific rigidity, determined by Young's modulus (GPa) and density (g/cm3), of at least 100 GPa·cm3/g.
Claims4
A scanning mirror comprising:
- A disk shaped mirror base;
- and
- a reflective film formed directly across an entire surface of the mirror base,
- wherein the mirror base is formed from a non-metallic material having a specific rigidity, determined by Young's modulus and density, of at least 100 GPa·cm3/g;
- and
- wherein the scanning mirror is resonated about a rotational axis via a shaft connected to a drive unit.
3 more elements
Dependencies are inferred from the claim text.