Back to results
US 10,119,990 B2Granted
Scanning probe microscope and method for examining a surface with a high aspect ratio
AssigneeCarl Zeiss SMT GmbH
InventorsChristof Baur, Klaus Edinger
Life of this patent
Estimating the term…
Abstract
The invention relates to a scanning probe microscope, having: (a) a scanning device for scanning a measurement tip over a surface; (b) a cantilever for the measurement tip, wherein the cantilever has a torsion region; (c) wherein the torsion region is configured such that it undergoes torsion when a control signal is applied and thereby pivots the measurement tip; and (d) a control device for outputting the control signal when the measurement tip scans a region of the surface that can be examined more closely with a pivoted measurement tip than without pivoting the measurement tip.
Claims26
A scanning probe microscope, having:
- a. a scanning device for scanning a measurement tip over a surface;
- b. a cantilever for the measurement tip, wherein the cantilever has a torsion region;
- c. wherein the torsion region is configured such that it undergoes torsion when a control signal is applied and thereby pivots the measurement tip;
- and
- d. a control device for determining, when the measurement tip scans a region of the surface, whether the region can be examined more closely with a pivoted measurement tip than without pivoting the measurement tip, and outputting the control signal in response to a determination that the region of the surface can be examined more closely with the pivoted measurement tip than without pivoting the measurement tip, wherein the scanning device is configured to extend a distance feedback loop means for the z-movement to a z-x-movement to monitor a distance between the surface and the measurement tip along a z-x plane based on at least one parameter measured by the scanning device, wherein the x-direction indicates a fast scan direction, and the z-direction is perpendicular to the surface,
- wherein the control device is configured to generate an image of the region of the surface based on data gathered from a first scan of the region of the surface, and analyze the image to determine whether indications are present in the image that the measurement tip was not able to realistically scan the region of the surface in which a detected topography of a portion of the region of the surface is similar to or the same as a contour of the measurement tip,
- wherein the control device is configured to, upon determining that indications are present in the image that the measurement tip was not able to realistically scan the region of the surface, cause the measurement tip to have a first pivot angle and perform a second scan of the region of the surface with the measurement tip having the first pivot angle,
- wherein the control device is configured to generate a second image of the region of the surface based on data gathered from the second scan of the region of the surface, and analyze the second image to determine whether indications are present in the second image that the measurement tip was not able to realistically scan the region of the surface, and
- wherein the control device is configured to, upon determining that indications are present in the second image that the measurement tip was not able to realistically scan the region of the surface, cause the measurement tip to have a second pivot angle and perform a third scan of the region of the surface with the measurement tip having the second pivot angle.
6 more elements
A method for examining a surface with a high aspect ratio, including:
- a. scanning a measurement tip over the surface, wherein the measurement tip is attached to a cantilever, and the cantilever has a torsion region;
- b. making a decision regarding, when the measurement tip scans a region of the surface, whether the region can be examined more closely with a pivoted measurement tip than without pivoting the measurement tip on the basis of a comparison of a just detected topography of the surface with a contour of the measurement tip;
- c. applying a control signal upon making the decision that when the measurement tip scans the region of the surface, the region can be examined more accurately with the pivoted measurement tip than without pivoting the measurement tip;
- d. in response to the control signal, subjecting the torsion region to torsion for pivoting the measurement tip;
- e. on the basis of a detected topography of the surface, deciding whether the measurement tip is pivoted;
- f. generating the just detected topography of the surface based on data gathered from a first scan of the surface, and analyzing the just detected topography and the contour of the measurement tip to determine whether indications are present in the just detected topography that the measurement tip was not able to realistically scan the surface in which the just detected topography is similar to or the same as a contour of the measurement tip;
- g. upon determining that indications are present in the just detected topography of the surface that the measurement tip was not able to realistically scan the region of the surface, causing the measurement tip to have a first pivot angle and performing a second scan of the region of the surface with the measurement tip having the first pivot angle,
- h. generating a second just detected topography of the surface based on data gathered from the second scan of the region of the surface, and analyzing the second just detected topography of the surface to determine whether indications are present in the second just detected topography of the surface that the measurement tip was not able to realistically scan the region of the surface, and
- i. upon determining that indications are present in the second just detected topography of the surface that the measurement tip was not able to realistically scan the region of the surface, causing the measurement tip to have a second pivot angle and performing a third scan of the region of the surface with the measurement tip having the second pivot angle.
6 more elements
Dependencies are inferred from the claim text.