Birefringence measurement device and birefringence measurement method

Abstract

A birefringence measurement device includes a light flux generator for generating light flux, a light flux irradiator for irradiating a measurement target with the light flux in a predetermined polarization state, an imaging optical system for forming an image from light flux transmitted through the measurement target, a polarization/diffraction grating positioned within the imaging optical system, an image pickup for generating a light-dark signal related to brightness of the image, and an output for outputting information regarding a phase difference for the light flux. The phase difference resulting from the transmission through the measurement target is determined on the basis of the light-dark signal. The image pickup generates the light-dark signal for the image based on at least one beam of diffracted light from among a plurality of beams of diffracted light produced by the grating. A two-dimensional distribution of birefringence is obtained in real time without a rotating mechanism.

Dependencies are inferred from the claim text.