Multichannel thermocouple compensation for three dimensional temperature gradient
AssigneeLam Research Corporation
InventorsFred Dennis Egley, John Distinti, Peter Norton, Andrea Wang
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AssigneeLam Research Corporation
InventorsFred Dennis Egley, John Distinti, Peter Norton, Andrea Wang
Estimating the term…
A method of using a thermocouple is provided. The method includes, but is not limited to, disposing at least one temperature sensor at each of two or more respective portions of an electrical connector adapted to receive thermocouple signals, measuring temperatures at the two or more portions, and calculating the temperatures at each terminal of the electrical connector based on measured temperature values of the two or more respective portions having the disposed temperature sensors. The method also includes, but is not limited to, calculating a cold junction temperature of a terminal for at least one thermocouple channel carrying the thermocouple signals based on measured or calculated temperature values of the terminals, or a combination thereof.
An apparatus for measuring a temperature at a source, the apparatus comprising:
An apparatus for measuring a temperature at a source, the apparatus comprising:
An apparatus for measuring a temperature at a source, the apparatus comprising:
Dependencies are inferred from the claim text.