Angular velocity sensor, electronic apparatus, and mobile object

An angular velocity sensor comprising:

• a substrate;
• a plurality of mass units which are disposed above the substrate;
• a plurality of coupling units which couple the mass units that are adjacent to each other, among the plurality of mass units, the adjacent mass units being connected to opposing ends of one of the coupling units;
• a plurality of drive units which are disposed above the substrate;
• and
• each of the plurality of drive units having a fixing unit fixed to the substrate,
• wherein each of the plurality of drive units is connected to a corresponding one of the coupling units respectively, and
• each of the plurality of drive units directly drives the corresponding one of the plurality of coupling units to vibrate the mass units through the corresponding coupling unit using the fixing unit as a center of the motion.

An angular velocity sensor comprising:

• a substrate;
• a first mass unit connected to a first fixing unit via a first spring, the first fixing unit fixed to the substrate;
• a second mass unit connected to a second fixing unit via a second spring, the second fixing unit fixed to the substrate;
• a first coupling unit connecting the first mass unit and the second mass unit;
• a first drive unit connected to a third fixing unit fixed to the substrate and connected to the first coupling unit;
• wherein
• the first drive unit directly drives the first coupling unit to vibrate the first mass unit and the second mass unit using the first fixing unit as a center of motion.