US 10,119,821 B2Granted

Angular velocity sensor

AssigneePanasonic Intellectual Property Management Co., Ltd.

InventorsTsuyoshi Fujii, Kensaku Yamamoto

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Abstract

A sensor includes a sensor element, defined in an XY plane, including a first member, a second member having a first portion extending from the first member in a positive Y axis direction, a second portion extending from the first portion in a positive X axis direction and a third portion extending from the second portion in a negative Y axis direction, and a third member having a first section and a second section having a rectangular shape in a top view respectively. The first portion, the second portion and the third portion extend along a periphery of the first section in the top view respectively. The second section is connected to the third portion and extends from the first section in a positive Y axis direction. A length of the second member is larger than a length of the third member in a positive X axis direction.

Claims21

Dependent claims

A sensor comprising:

a sensor element defined in an XY plane having an X axis and a Y axis that is orthogonal to the X axis, wherein the sensor element including:
a first member,
a second member consisting of a first portion extending from the first member in a positive direction of the Y axis, a second portion extending from the first portion in a positive direction of the X axis and a third portion extending from the second portion in a negative direction of the Y axis, and
a third member consisting of a first section and a second section which has a rectangular shape in a top view,
wherein the first portion, the second portion and the third portion extend along a periphery of the first section in the top view respectively,
wherein the second section is connected to the third portion and extends from the first section in the positive direction of the Y axis,
wherein a width of the second portion along the Y axis is smaller than a width of the first portion along the X axis, and is broader than a width of the third portion along the X axis, and
wherein a length of the second member along the X axis is larger than a length of the third member along the X axis.

5 more elements

Dependencies are inferred from the claim text.

Facts

Application: 15/058,374Filed 2 Mar 2016 · continuation
Priority: JP 2010-29193128 Dec 2010
Published: US 2016/0195395 A17 Jul 2016
Granted: 6 Nov 2018
Term ends: Not estimatedThe source records don’t support an estimate.

Classification7 codes

G01C 19/5719
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces: using planar vibrating masses driven…
G01C 19/56
Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic…:…
G01C 19/5607
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces: using vibrating tuning forks
G01C 19/574
Structural details or topology: the devices having two sensing masses in anti-phase motion

Family

PCT/JP2011/007190Parent of this continuation · filed 22 Dec 2011
US 2016/0195395 A1Pre-grant publication · published 7 Jul 2016
Application13/989,644Parent of this continuation
US 9,303,993 B2Parent of this continuation
US 2013/0239681 A1Published application
US 10,119,821 B2This patent

From the US filing history. Foreign family members aren’t listed.

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