Indexed gas jet injector for substrate processing system

A substrate processing tool, comprising:

• a substrate carrier configured to support one or more substrates when disposed thereon;
• and
• a first substrate processing module comprising:
• an enclosure having a lower surface to support the substrate carrier and a gas injector assembly forming a top of the enclosure that provides one or more processing gases into the enclosure;
• an indexed jet injector disposed above the gas injector assembly, the indexed jet injector comprising:
• a body having a substantially cylindrical central volume;
• a gas input port disposed on a first surface of the body;
• a gas distribution drum disposed within the cylindrical central volume and rotatably coupled to the body, the gas distribution drum having a plurality of jet channels formed through the gas distribution drum;
• and
• a plurality of indexer output ports formed on a second surface of the body;
• and
• an exhaust disposed opposite the gas injector assembly to remove process gases from the enclosure.