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US 10,119,188 B2Granted
Plasma erosion resistant rare-earth oxide based thin film coatings
AssigneeApplied Materials, Inc.
InventorsJennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor, Tom Cho
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Abstract
An article comprises a body and at least one protective layer on at least one surface of the body. The at least one protective layer is a thin film having a thickness of less than approximately 20 microns that comprises a ceramic selected from a group consisting of Y3Al5O12, Y4Al2O9, Er2O3, Gd2O3, Er3Al5O12, Gd3Al5O12 and a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2.
Claims20
An article comprising:
- a body;
- and
- a first conformal protective layer on at least one surface of the body, wherein the first conformal protective layer is a thin film having a thickness of approximately 0.5-20 microns that comprises a first ceramic selected from a group consisting of
- Y3Al5O12 having a hardness of approximately 8.5 GPa,
- Er2O3 having a hardness of approximately 5 GPa,
- Er3Al5O12 having a hardness of approximately 9 GPa, and
- a ceramic compound comprising Y4Al2O9 and a solid-solution of Y2O3—ZrO2 having a hardness of approximately 7.825 GPa.
4 more elements
Dependencies are inferred from the claim text.