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US 10,118,392 B2Granted
Fluid feed slot for fluid ejection device
AssigneeHewlett-Packard Development Company, L.P.
InventorsEd Friesen, Rio Rivas, Kelly Ronk
Life of this patent
Estimating the term…
Abstract
A method of forming a substrate for a fluid ejection device includes forming an opening in the substrate from a second side toward a first side, and further forming the opening in the substrate to the first side, including increasing the opening to the first side and increasing the opening at the second side, and forming the opening with substantially parallel sidewalls intermediate the first side and the second side and converging sidewalls to the first side.
Claims11
A fluid ejection device, comprising:
- a substrate having a first side and a second side opposite the first side;
- a thin-film structure formed on the first side of the substrate, the thin-film structure having a fluid feed hole formed therethrough;
- and
- a fluid feed slot formed by an opening extending through the substrate between the first side and the second side, the fluid feed slot communicated with the fluid feed hole,
- wherein the fluid feed slot has parallel sidewalls intermediate the first side and the second side, converging sidewalls from the parallel sidewalls to the first side, and diverging linear sidewalls sloped from the parallel sidewalls to the second side,
- wherein, at the first side, the fluid feed slot, as defined by the converging sidewalls, is wider than the fluid feed hole.
3 more elements
Dependencies are inferred from the claim text.