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US 10,118,317 B2Granted
Template and pattern formation method
AssigneeToshiba Memory Corporation
InventorsYoshihisa Kawamura, Masayuki Hatano, Yohko Komatsu, Hiroyuki Kashiwagi
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Abstract
According to one embodiment, a template includes a template pattern and a liquid repellent pattern. The template pattern is formed on a substrate. The liquid repellent pattern has liquid repellency to a resist and are disposed on a periphery of a region for arrangement of the template pattern.
Claims16
A template comprising:
- a template pattern formed on a substrate;
- and a liquid repellent pattern that has liquid repellency to a resist and is disposed on a periphery of a region for arrangement of the template pattern,
- wherein
- the liquid repellent pattern includes
- a portion formed of a concave portion, and
- a liquid guide portion that guides the resist from the region for arrangement of the template pattern to a periphery of the portion formed of the concave portion, and
- the liquid guide portion includes
- a surrounding pattern concentrically surrounding the periphery of the portion formed of the concave portion with a predetermined distance from the portion formed of the concave portion, and
- a guiding pattern having one end connected to the surrounding pattern, and another end positioned on a side of the region for arrangement of the template pattern.
6 more elements
Dependencies are inferred from the claim text.