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US 10,118,263 B2Granted
Monolithic manifold mask and substrate concepts
AssigneeLam Researech Corporation
InventorsMichael C. Kellogg, Andrew C. Lee, Christopher J. Pena
Life of this patent
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Abstract
Component-locating templates or masks for use with positioning fluid-flow components on monolithic ceramic substrates are provided, as well as techniques for the manufacture of such templates.
Claims13
An apparatus comprising:
- a ceramic monolithic manifold (CMM) for routing semiconductor processing gases between various fluid flow components, the CMM including:
- a plurality of internal passages,
- a plurality of first drop-holes formed in a first side of the CMM prior to sintering the CMM, each first drop-hole leading to one of the internal passages, and
- one or more reference features formed after the CMM has been sintered;
- and
- a first template, the first template including:
- one or more first template-locating features configured to interface with the one or more reference features of the CMM so as to locate the first template relative to the CMM when the first template is laid against the first side of the CMM, and
- one or more first component-locating features that are positioned with respect to a template reference coordinate system defined by the one or more first template-locating features based, at least in part, on measured positions of the first drop-holes relative to a substrate reference coordinate system defined by the one or more reference features, wherein:
- the first template is laid against the first side of the CMM and the one or more first template-locating features is interfaced with the one or more reference features,
- each first component-locating feature is positioned over one of the first drop-holes, and
- each first component-locating feature is configured to position one of a plurality of first fluid flow components relative to one or more of the first drop-holes when that first fluid flow component is mounted to the apparatus.
8 more elements
A method comprising:
- forming a plurality of first drop-holes in a first side of a ceramic substrate;
- sintering the ceramic substrate after forming the plurality of first drop-holes in the first side of the ceramic substrate;
- forming one or more reference features in the ceramic substrate after the ceramic substrate has been sintered;
- measuring a two-dimensional location of each first drop-hole relative to a substrate reference coordinate system defined by the one or more reference features;
- forming one or more template-locating features in a template, the one or more template-locating features configured to interface with the one or more reference features so as to allow the template to be laid against the ceramic substrate and fixed in at least two dimensions relative to the ceramic substrate by interfacing the one or more template-locating features with the one or more reference features;
- and
- forming one or more component-locating features in the template, each component-locating feature positioned relative to a template reference coordinate system defined by the one or more template-locating features based, at least in part, on the measured location of one of the first drop-holes relative to the substrate reference coordinate system.
4 more elements
Dependencies are inferred from the claim text.