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US 10,118,204 B2Granted
Cleaning apparatus
AssigneesIHI Corporation, IHI Machinery and Furnace Co., Ltd.
InventorsKazuhiko Katsumata, Masatoshi Mitsuzuka, Osamu Sakamoto, Takahiro Nagata
Life of this patent
Estimating the term…
Abstract
A cleaning apparatus includes: a cleaning chamber that accommodates an object to be cleaned; a drying chamber connected to the cleaning chamber; a connecting member connecting a first opening provided in the cleaning chamber and a second opening provided in the drying chamber; a valve element positioned inside the cleaning chamber and facing the first opening; a valve seat facing the valve element; and an actuator that drives the valve element.
Claims7
A cleaning apparatus comprising:
- a cleaning chamber that accommodates an object to be cleaned;
- a drying chamber connected to the cleaning chamber;
- a connecting member connecting a first opening provided in the cleaning chamber and a second opening provided in the drying chamber;
- a valve element positioned inside the cleaning chamber and facing the first opening;
- a valve seat facing the valve element;
- and
- an actuator that drives the valve element,
- wherein the valve element is configured to be separated from the valve seat inward of the cleaning chamber.
5 more elements
Dependencies are inferred from the claim text.