Film forming apparatus

A film forming apparatus which sprays a first material which is atomized to an atmosphere so as to form a film on a substrate, comprising:

• a mounting part on which said substrate is mounted;
• and
• a mist spray head which sprays said first material to an upper surface of a substrate mounted on said mounting part, wherein
• said mist spray head includes:
• a first material spray nozzle which sprays said first material and
• a first material ejection part which is provided in a side of said mist spray head facing said substrate, so that said first material which is atomized is sprayed to said substrate, and
• said first material spray nozzle includes:
• a first cavity;
• a first material supply part which supplies said first material which is atomized into said first cavity;
• and
• a first material discharge part which is drilled in a side surface of said first cavity, being away from a bottom surface of said first cavity, and is connected to said first material ejection part;
• said first material spray nozzle further includes a first straightening plate provided in said first cavity to straighten a flow of said first material, and which extends at an oblique angle from one side edge to an opposite side edge of said first material spray nozzle and to divide a space in the first material spray nozzle into the first cavity and a lower second cavity.