Scalable nucleic acid-based nanofabrication
AssigneePresident and Fellows of Harvard College
InventorsJie Shen, Wei Sun, Peng Yin
Life of this patent
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Abstract
The present disclosure relates to the alignment of moieties (e.g., nanoparticles and/or nanowires) into prescribed architectures on two- and/or three-dimensional substrates (e.g., nucleic acid nanostructures/crystals). The present disclosure also relates to a nucleic acid (e.g., DNA) lithography method that includes, in some embodiments, adsorbing a bare nucleic acid nanostructure onto a surface of a substrate, and etching the surface of the substrate containing the bare nucleic acid nanostructure, thereby producing a patterned substrate.
Claims38
A nucleic acid lithography method comprising:
- (a) adsorption a bare nucleic acid nanostructure onto a surface of a substrate;
- and
- (b) dry etching the surface of the substrate onto which the bare nucleic acid nanostructure is adsorbed, thereby producing a patterned substrate.
A nucleic acid lithography method comprising:
- (a) adsorbing a bare nucleic acid nanostructure onto a first substrate layer that is positioned above a second substrate layer;
- (b) dry etching or wet etching the surface of the first substrate layer onto which the bare nucleic acid nanostructure is adsorbed, thereby producing a secondary mask that is positioned above the second substrate layer;
- and
- (c) dry etching the second substrate layer onto which the secondary mask is adsorbed, thereby producing a patterned substrate.
A device comprising
- a substrate having a spatial resolution of 50 nm or less and containing at prescribed locations nucleic acid handles hybridized to complementary nucleic acid anti-handles that are coupled to moieties.
A device comprising
- a substrate having a spatial resolution of less than 50 nm and containing at prescribed locations a moiety, wherein the moiety is indirectly coupled to or confined to the substrate through a nucleic acid hybridization interaction, a protein-protein interaction, a hydrophobic interaction, an electrostatic interaction, π-π stacking, spatial confinement or electrophoresis.
A device comprising
- a substrate having a spatial resolution of less than 50 nm and at least one channel, wherein moieties are spatially confined to the at least one channel, and the diameter of the at least one channel is no wider than twice the average diameter of the moieties.
Dependencies are inferred from the claim text.