Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium

A liquid immersion exposure method comprising:

• projecting exposure light onto an object through a projection system having an optical member;
• and
• at least during the projecting, forming a liquid immersion space on a surface of the object while the object is disposed opposite to an emitting surface of the optical member, the liquid immersion space being formed by a liquid immersion member,
• wherein:
• the liquid immersion member includes (i) a first member that has a first liquid supply port and a first opening through which the exposure light is projected, (ii) a second member that has a first liquid recovery port facing downwardly and that is movable with respect to the first member, and (iii) a gas supply port arranged radially outward of the first liquid recovery port with respect to a path of the exposure light,
• the first liquid supply port faces an outer surface of the optical member,
• the first liquid recovery port has a plurality of recovery openings disposed in a four-sided shape to surround the first opening of the first member,
• the second member is movable relative to the first member in a direction perpendicular to an optical axis of the optical member so that a relative speed between the second member and the object is different than a relative speed between the first member and the object, while recovering liquid in a gap between the second member and the object via the first liquid recovery port of the second member,
• the first member has a second liquid recovery port, and
• the second liquid recovery port faces the outer surface of the optical member.