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US 10,083,827 B2Granted
Simplified lamp design
AssigneeApplied Materials, Inc.
InventorJoseph M. Ranish
Life of this patent
Estimating the term…
Abstract
Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.
Claims4
A lamp assembly, comprising:
- a capsule having a filament disposed therein;
- a press seal extending from the capsule and configured to hermetically seal the capsule;
- a first lead and a second lead, wherein each of the first and second leads is electrically coupled to the filament within the press seal and extends from the press seal;
- a third lead extending directly from the press seal, wherein the third lead is electrically isolated from the first and second leads within the press seal, wherein the third lead includes a hook portion comprising a right angle bend within the press seal, and wherein the third lead absorbs compressive force applied to a fuse during installation of the lamp, the fuse positioned external to the press seal and capsule, wherein the fuse electrically couples the third lead to one of the first and second leads.
1 more element
Dependencies are inferred from the claim text.