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US 10,015,841 B2Granted
Micro heater and micro sensor and manufacturing methods thereof
AssigneePoint Engineering Co., Ltd.
InventorsBum Mo Ahn, Seung Ho Park, Sung Hyun Byun
Life of this patent
Estimating the term…
Abstract
A micro heater and a micro sensor is capable of providing a heater having a small thermal capacity by forming an air gap which surrounds the heater wire, and forming the heater wire on a porous substrate.
Claims18
A micro heater comprising:
- a porous substrate formed of an aluminum oxide porous layer;
- a heater electrode which is formed on said porous substrate and includes a heater wire and a heater electrode pad which is connected to said heater wire;
- and
- an air gap which surrounds said heater wire is formed in said porous substrate,
- wherein said air gap is formed by completely penetrating said porous substrate.
2 more elements
A micro heater comprising:
- a porous substrate;
- and
- a heater electrode which is formed in said porous substrate and includes a heater wire and a heater electrode pad which is connected to said heater wire,
- wherein a first supporting portion which supports said heater wire and a second supporting portion which supports said heater electrode pad are formed on said porous substrate, and an air gap is formed between said first supporting portion and said second supporting portion, and the shape of said second supporting portion is formed to be identical or similar to the shape of said heater electrode pad,
- wherein said air gap is formed by completely penetrating said porous substrate.
2 more elements
A micro sensor comprising:
- a porous substrate formed of an aluminum oxide porous layer;
- a sensor electrode which is formed on said porous substrate and includes a sensor wire and a sensor electrode pad which is connected to said sensor wire;
- a heater electrode which is formed on said porous substrate and includes a heater electrode pad, and a heater wire which is connected to said heater electrode pad and disposed closer to said sensor wire than said sensor electrode pad;
- and
- an air gap which surrounds said heater wire and said sensor wire is formed in said porous substrate, wherein said air gap is formed by completely penetrating said porous substrate.
2 more elements
A micro sensor comprising:
- a heater electrode which includes a heater wire wherein a plurality of first protrusions are formed in the end portion thereof, and a heater electrode pad being connected to said heater wire;
- a sensor electrode which includes a sensor wire wherein a plurality of second protrusions disposed between said first protrusions, and a sensor electrode pad being connected to said sensor wire;
- and
- an aluminum oxide porous layer which supports said heater electrode and said sensor electrode;
- and
- an air gap formed between said heater electrode pad and said sensor electrode pad by removing a portion of said aluminum oxide porous layer, wherein said air gap is formed by completely penetrating said aluminum oxide porous layer.
3 more elements
A micro sensor comprising:
- a porous substrate;
- a sensor electrode which is formed on said porous substrate and includes a sensor wire and a sensor electrode pad which is connected to said sensor wire;
- and
- a heater electrode which is formed on said porous substrate and includes a heater wire and heater electrode pad which is connected to said heater wire,
- wherein said porous substrate includes:
- a sensor electrode pad support which supports said sensor electrode pad;
- and
- a heater electrode pad support which supports said heater electrode pad;
- and
- an air gap is formed between said heater electrode pad support and said sensor electrode pad support, wherein said air gap is formed by completely penetrating said porous substrate.
7 more elements
A micro sensor comprising:
- a porous substrate;
- a sensor electrode which is formed on said porous substrate and includes a sensor wire, and a sensor electrode pad which is connected to said sensor wire;
- and
- a heater electrode which is formed on said porous substrate and includes a heater wire, and a heater electrode pad which is connected to said heater wire,
- wherein said porous substrate includes:
- a first supporting portion which supports said heater wire and said sensor wire;
- a heater electrode pad support which supports said heater electrode pad;
- a sensor electrode pad support which supports said sensor electrode pad;
- and
- an air gap is formed by removing all portions of said porous substrate except said first supporting portion, said heater electrode pad support, and said sensor electrode pad support, wherein said air gap is formed by completely penetrating said porous substrate.
7 more elements
A micro sensor comprising:
- a heater electrode which includes a heater wire wherein a plurality of first protrusions are formed in the end portion thereof, and a first and a second heater electrode pads which are connected to both sides of said heater wire;
- a sensor electrode which includes a sensor wire wherein a plurality of second protrusions are disposed between said first protrusions, and a sensor electrode pad which is connected to said sensor wire;
- and
- a porous substrate which supports said heater electrode and said sensor electrode,
- wherein said porous substrate includes:
- a first supporting portion supporting said heater wire and said sensor wire;
- a first heater electrode pad support which supports said first heater electrode pad;
- a second heater electrode pad support which supports said second heater electrode pad;
- a sensor electrode pad support which supports said sensor electrode pad;
- and
- an air gap which is formed on an outer side of said first supporting portion, wherein said air gap is formed by completely penetrating said porous substrate.
8 more elements
A micro heater comprising:
- a porous substrate formed of an aluminum oxide porous layer;
- a heater electrode which is formed on said porous substrate and includes a heater wire and a heater electrode pad which is connected to said heater wire;
- an air gap which surrounds said heater wire is formed in said porous substrate, wherein said air gap is formed by completely penetrating said porous substrate;
- and
- an opening, which is disposed in the lower portion of said heater wire and communicating with said air gap, is formed in the lower portion of said porous substrate.
2 more elements
A micro sensor comprising:
- a porous substrate formed of an aluminum oxide porous layer;
- a sensor electrode which is formed on said porous substrate and includes a sensor wire and a sensor electrode pad which is connected to said sensor wire;
- a heater electrode which is formed on said porous substrate and includes a heater electrode pad, and a heater wire which is connected to said heater electrode pad and disposed closer to said sensor wire than said sensor electrode pad;
- an air gap, which surrounds said heater wire and said sensor wire, is formed in said porous substrate;
- and
- an opening, which is disposed in the lower portion of said heater wire and communicating with said air gap, is formed in the lower portion of said porous substrate,
- wherein said air gap is formed by completely penetrating said porous substrate.
4 more elements
Dependencies are inferred from the claim text.