Abstract
An angular velocity measuring apparatus for detecting an angular velocity of a rotation about a rotation axis including a vibration element, a semiconductor integrated circuit chip for processing signals supplied to and from the vibration element and a circuit board on which the semiconductor integrated circuit chip is mounted, and the vibration element is mounted on the semiconductor integrated circuit chip by means of a supporting member including a metal support rod and an adhesive layer. The vibration element and semiconductor integrated circuit chip are arranged to be overlapped with each other viewed in a direction of the rotation axis and are arranged substantially in parallel with each other in planes which are substantially perpendicular to the rotation axis.
Key facts
- Application
- 09/954,713Filed 18 Sep 2001
- Priority
- JP 2000-3020252 Oct 2000
- Published
- US 2002/0046604 A125 Apr 2002
- Granted
- 23 Mar 2004
- Term ends
- Not estimatedThe source records don’t support an estimate.
Classification2 codes
- G01C 19/5719
Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces: using planar vibrating masses driven…
- G01C
Measuring distances, levels or bearings
Family
- US 2002/0046604 A1Pre-grant publication · published 25 Apr 2002
- US 6,708,564 B2This patent
From the US filing history. Foreign family members aren’t listed.