Semiconductor device and production method thereof
AssigneeSony Corporation
InventorOsamu Yamagata
Life of this patent
Estimating the term…
Abstract
A semiconductor device and a production method thereof capable of reducing warps of a semiconductor wafer when packaging at a wafer level in a SiP type semiconductor device, is configured that an insulating layer is formed by stacking a plurality of resin layers on a semiconductor chip formed with an electronic circuit, wiring layers are buried in the insulating layer and electrically connected to electrodes, and formation areas of the plurality of resin layers become gradually smaller from an area of an upper surface of the semiconductor chip as they get farther from the semiconductor chip, so that a side surface and an upper surface of each of the resin layers and the upper surface of the semiconductor chip form a stepwise shape.
Claims39
A semiconductor device, comprising:
- a semiconductor chip with a built-in electronic circuit, having electrodes formed on a surface thereof that are taken out from the electronic circuit;
- an insulating layer formed of a plurality of resin layers stacked on the semiconductor chip;
- and
- a wiring layer formed so as to be electrically connected to the electrodes and buried in the insulating layer;
- wherein
- the plurality of the resin layers is formed, so that as the layers get farther from the semiconductor chip, their formation areas become gradually smaller from an area of an upper surface of the semiconductor chip, and
- a side surface and an upper surface of each of the resin layers and the upper surface of the semiconductor chip form a stepwise shape, wherein widths of exposed upper surfaces of the resin layers at the stepwise shaped portion are 5 μm or more in the plurality of the resin layers.
A semiconductor device, comprising:
- a semiconductor chip with a built-in electronic circuit, having electrodes formed on a surface thereof that are taken out from the electronic circuit;
- an insulating layer formed of a plurality of resin layers stacked on the semiconductor chip;
- and
- a wiring layer formed so as to be electrically connected to the electrodes and buried in the insulating layer;
- wherein
- the plurality of the resin layers is formed, so that as the layers get farther from the semiconductor chip, their formation areas become gradually smaller from an area of an upper surface of the semiconductor chip, and
- a side surface and an upper surface of each of the resin layers and the upper surface of the semiconductor chip form a stepwise shape, wherein an electronic element and/or another semiconductor chip are formed by being buried in the insulating layer so as to be electrically connected to the wiring layer.
A semiconductor device, comprising:
- a semiconductor chip with a built-in electronic circuit, having electrodes formed on a surface thereof that are taken out from the electronic circuit;
- an insulating layer formed of a plurality of resin layers stacked on the semiconductor chip;
- and
- a wiring layer formed so as to be electrically connected to the electrodes and buried in the insulating layer;
- wherein
- the plurality of the resin layers is formed, so that as the layers get farther from the semiconductor chip, their formation areas become gradually smaller from an area of an upper surface of the semiconductor chip, and
- a side surface and an upper surface of each of the resin layers and the upper surface of the semiconductor chip form a stepwise shape, wherein
- the plurality of resin layers includes a first resin layer having a tapered edge.
Dependencies are inferred from the claim text.