Process and system for uniformly crystallizing amorphous silicon substrate by fiber laser

A system for crystallizing an amorphous silicon (a-Si) film by sequential lateral solidification (SLS), comprising:

• a quasi-continuous wave (QCW) fiber laser source operative to emit a pulsed line beam in an ultra-violet (UV) wavelength range and configured to have a master oscillator (MO) power fiber amplifier (MOPFA) optical scheme, the MO being directly modulated;
• and
• a controller operative to control the MO so as to emit:
• multiple discrete packets of light at a burst repetition rate (BRR), each packet having a duration in a ns range and a packet energy in a microjoule (μJ) range, and
• a plurality of ns pulses within each packet emitted at a pulse repetition rate (PRR) in a ns range which is higher than the BRR, wherein a pulse energy, pulse duration and the PRR are controlled so that each packet has a desired packet temporal power profile and packet energy sufficient to provide crystallization of a-Si to polysilicon (p-Si) at each location of the film which is exposed to at least one packet.

A system for crystallizing an amorphous silicon (a-Si) film by sequential lateral solidification (SLS), comprising:

• a quasi-continuous wave (QCW) fiber laser source operative to emit a pulsed line beam in an ultra-violet (UV) wavelength range and configured to have a master oscillator (MO) power fiber amplifier (MOPFA) optical scheme, the MO being directly modulated;
• and
• a controller operative to control the MO so as to emit:
• multiple discrete packets of light at a burst repetition rate (BRR), each packet having a duration in a ns range, and
• a plurality of ns pulses within each packet emitted at a pulse repetition rate (PRR) in a ns range which is higher than the BRR, wherein a pulse energy, pulse duration and the PRR are controlled so that each packet has a desired packet temporal power profile and packet energy sufficient to provide crystallization of a-Si to polysilicon (p-Si) at each location of the film which is exposed to at least one packet.