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US RE47,989 E1Granted
Acoustic wave device
AssigneeTaiyo Yuden Co., Ltd.
InventorsTsuyoshi Yokoyama, Yoshiki Iwazaki, Tokihiro Nishihara, Yosuke Onda
Life of this patent
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Abstract
An acoustic wave device includes: a piezoelectric film made of an aluminum nitride film containing a divalent element and a tetravalent element, or a divalent element and a pentavalent element; and an electrode that excites an acoustic wave propagating through the piezoelectric film.
Claims41
An acoustic wave device comprising:
- a piezoelectric film made of an aluminum nitride film containing a divalent element and one of a tetravalent or pentavalent element;
- and
- electrodes connected to the piezoelectric film to excite an acoustic wave propagating through the piezoelectric film,
- wherein the divalent element and one of the tetravalent or pentavalent element are substituted for aluminum atoms of the aluminum nitride film.
1 more element
An acoustic wave device comprising:
- a piezoelectric film made of an aluminum nitride film containing an element capable of at least increasing a permittivity or decreasing an acoustic velocity when the element is added to the aluminum nitride constituting the film which is then charged with electricity;
- and
- electrodes connected to the piezoelectric film to excite an acoustic wave propagating through the piezoelectric film, wherein
- a resonance frequency of the acoustic wave is less than or equal to 1.5 GHz, and
- the element is substituted for aluminum atoms of the aluminum nitride film.
2 more elements
An acoustic wave device comprising:
- a piezoelectric film is an aluminum nitride film containing a divalent element and a tetravalent element, and
- electrodes connected to the piezoelectric film to excite an acoustic wave propagating through the piezoelectric film, wherein
- a total of concentrations of the divalent element and the tetravalent element is greater than or equal to 3 atomic % and less than or equal to 35 atomic % when a total number of atoms of the divalent element, the tetravalent element, and aluminum in the aluminum nitride film defines 100 atomic %.
An acoustic wave device comprising:
- a piezoelectric film is an aluminum nitride film containing a divalent element and a tetravalent element, and
- electrodes connected to the piezoelectric film to excite an acoustic wave propagating through the piezoelectric film, wherein
- a ratio of a concentration of the tetravalent element to a total of concentrations of the divalent element and the tetravalent element is greater than or equal to 0.35 and less than or equal to 0.75 when a total number of atoms of the divalent element, the tetravalent element, and aluminum in the aluminum nitride film defines 100 atomic %.
An acoustic wave device comprising:
- a piezoelectric film made of an aluminum nitride film containing a divalent element and one of a tetravalent or pentavalent element;
- and
- electrodes connected to the piezoelectric film to excite, by the inverse piezoelectric effect, or cause, by a strain due to the piezoelectric effect, an acoustic wave propagating through the piezoelectric film,
- wherein the divalent element and one of the tetravalent or pentavalent element are substituted for aluminum atoms of the aluminum nitride film.
1 more element
Dependencies are inferred from the claim text.