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US RE46,648 E1Granted
Polishing pad, polishing method and method of forming polishing pad
AssigneeIV Technologies CO., Ltd.
InventorYu-Piao Wang
Life of this patent
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Abstract
A polishing pad, a polishing method and a method of forming a polishing pad are provided. The polishing pad includes a polishing layer and a plurality of arc grooves. The arc grooves are disposed in the polishing layer. Each of the arc grooves has two ends, and at least one end thereof has an inclined wall. The angle between the inclined wall of each groove and the surface plane of the polishing layer is less than 90 degree.
Claims24
A polishing pad, comprising:
- a polishing layer;
- and
- a plurality of arc grooves, disposed in the polishing layer and forming a plurality of fan-shaped regions,
- wherein the plurality of arc grooves in the same fan-shaped region are concentric arc grooves with unequal radii, and
- a radial center of the concentric arc grooves in at least one fan-shaped region does not overlap with a rotational axis of the polishing pad, wherein one or both of the following conditions is satisfied:
- (a) the radial center of the concentric arc grooves in at least one fan-shaped region is located inside the polishing layer and spaced apart from an outer circumferential edge of the polishing layer, and
- (b) each of the concentric arc grooves in the at least one fan-shaped region has two ends, at least one of the ends located inside the polishing layer and spaced apart from the outer circumferential edge of the polishing layer.
4 more elements
A method of forming a polishing pad, comprising:
- providing a polishing layer;
- forming a plurality of concave regions in the polishing layer;
- and
- forming a plurality of arc grooves in regions outside the concave regions;
- and
- recovering the concave regions to form a smooth surface in the polishing layer,
- wherein each of the plurality of arc grooves has two ends, at least one end thereof has an inclined wall, and an angle between the inclined wall and a surface plane of the polishing layer is less than 90 degrees.
4 more elements
Dependencies are inferred from the claim text.