Method of manufacturing an ink jet recording head having piezoelectric element
AssigneeSeiko Epson Corporation
InventorsTsutomu Hashizume, Tetsushi Takahashi
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Abstract
A method of manufacturing an ink jet recording head. The method includes providing a laminated structure in which a first electrode layer is located on a diaphragm, a piezoelectric layer is located on the first electrode layer, and a second electrode layer is located on the piezoelectric layer and etching the first electrode layer, the second electrode layer and the piezoelectric layer so that a portion of the diaphragm is exposed. In this method, at least the second electrode layer and the piezoelectric layer are etched simultaneously.
Claims8
A method of manufacturing an ink jet recording head, the method comprising:
- providing a laminated structure in which a first electrode layer is located on above a diaphragm, a piezoelectric layer is located on above the first electrode layer, and a second electrode layer is located on above the piezoelectric layer;
- etching the first electrode layer, the second electrode layer and the piezoelectric layer so that a portion of the diaphragm is exposed;
- and
- attaching the diaphragm to a substrate,
- wherein at least the second electrode layer and the piezoelectric layer are etched simultaneously by a dry etching method using a common mask material to pattern the second electrode layer and the piezoelectric layer.
A method of manufacturing an ink jet recording head including a first electrode layer on above a diaphragm, a piezoelectric layer on above the first electrode layer and a second electrode layer on above the piezoelectric layer, the method comprising:
- etching the first electrode layer, the second electrode layer and the piezoelectric layer so that a portion of the diaphragm is exposed, and
- attaching the diaphragm to a substrate,
- wherein at least the second electrode layer and the piezoelectric layer are etched by a dry etching method in a same etching step using a common mask material to pattern the second electrode layer and the piezoelectric layer.
Dependencies are inferred from the claim text.