Method for detecting particles and defects and inspection equipment thereof

A method for detecting an anomaly of a substrate, the method comprising steps of:

• illuminating light on said substrate to form an illumination spot on said substrate;
• detecting light from said illumination spot;
• acquiring digital data expressed by (r, θ) coordinate system by using said detection result, and
• acquiring digital data expressed by two-dimensional Cartesian coordinate system by using a relative illumination distribution of said illumination spot, and said digital data expressed by (r, θ) coordinate system by a processing unit.

A method for detecting an anomaly of an object, the method comprising steps of:

• illuminating light on said object to form an illumination area on said object;
• detecting light from said illumination area;
• and
• using a processing unit to:
• acquire digital data expressed by a (r, θ) coordinate system by using a result of the detecting light from said illumination area,
• acquire digital data expressed by a two-dimensional Cartesian coordinate system by using an image of said illumination area, and said digital data expressed by the (r, θ) coordinate system by a processing unit, and
• acquire the anomaly's size by using digital data of said anomaly and said image.

The inspection apparatus according claim 26, further comprising:

• a changing unit which changes an optical condition of said illumination unit;
• a memory which stores a plurality of relative illumination distributions corresponding to a plurality of optical conditions;
• and
• a selecting unit which selects a relative illumination distribution corresponding to said optical condition changed by said changing unit from said relative illumination distributions.

An inspection apparatus which detects an anomaly of an object comprising;

• an illuminating unit which supplies light and forms an illumination area on said object;
• a detection unit which detects light from said illumination area;
• and
• a processing unit, wherein said processing unit:
• acquires digital data expressed by a (r, θ) coordinate system by using a detection result of said detection unit,
• acquires digital data expressed by a two-dimensional Cartesian coordinate system by using an image of said illumination area, and said digital data expressed by the (r, θ) coordinate system, and
• acquires the anomaly's size by using digital data of said anomaly and said image.