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US RE44,434 E1Granted
Optical position measuring system and method using a low coherence light source
AssigneeASML Holding N.V.
InventorJ. Christian Swindal
Life of this patent
Estimating the term…
Abstract
An optical position measuring system (e.g., an interferometer) includes a superluminescent device (SLD) (e.g., a laser diode having at least one anti-reflective coated surface) and a detector. The SLD generates a light beam having a short coherence length (e.g., about 0.1 mm to about 0.5 mm, less than the optical path length of an optical element, and/or less than a spacing between optical elements). Through use of the short coherence length light beam, interference effects from spurious or ghost reflections that exist in conventional position measuring systems are substantially reduced or eliminated.
Claims13
A position determining system that measures a position of an alignment mark on a substrate, comprising:
- a superluminescent device (SLD) that transmits a light beam having a longitudinal coherence length based on at least one optical parameter associated with one or more optical elements of the position determining system, wherein the longitudinal coherence length substantially eliminates ghost or spurious reflections from the one or more optical elements present during exposure of a pattern in a lithography tool;
- a lens system that directs the light beam to be diffracted from the alignment mark on a wafer, the diffracted light causing the ghost or spurious reflections through its interaction with the lens system;
- an interferometer configured to use the diffracted light to determine a position of the alignment mark to produce a control signal related to the determined position, wherein the interferometer is configured to determine the position of the alignment mark using an interference pattern;
- and
- a positioning system configured to align the substrate to receive the subsequent pattern based on the control signal,
- wherein the positioning system is configured to use the control signal to substantially reduce effect of the ghost or spurious reflections during receipt of the subsequent pattern by the substrate.
3 more elements
A position determining system that measures a position of an alignment mark on a substrate, comprising:
- a superluminescent device (SLD) configured to produce a light beam having a longitudinal coherence length based on at least one optical parameter associated with one or more optical elements of the position determining system that substantially eliminates interference between at least one of ghost or spurious reflections from the one or more optical elements present during exposure of a pattern in a lithography tool;
- a lens system that directs the light beam to be diffracted from the alignment mark on a wafer, the diffracted light causing the ghost or spurious reflections through its interaction with the lens system;
- an interferometer configured to use the diffracted light to determine a position of the alignment mark to produce a control signal related to the determined position, wherein the interferometer is configured to determine the position of the alignment mark using an interference pattern;
- and
- a positioning system configured to align the substrate to receive a subsequent pattern based on the control signal,
- wherein the position system is configured to use the control signal to substantially reduce effect of the ghost or spurious reflections during receipt of the subsequent pattern by the substrate.
3 more elements
A position measuring method that measures a position of an alignment mark on a substrate, comprising:
- determining a longitudinal coherence length for superluminescent light based on at least one optical parameter associated with one or more optical elements of a position determining system, wherein the longitudinal coherence length substantially eliminates ghost or spurious reflections from the one or more optical elements present during exposure of a pattern in a lithography tool;
- generating and transmitting the superluminescent light having the longitudinal coherence length;
- directing the superluminescent light to be diffracted from the alignment mark on a wafer using a lens system;
- diffracting the superluminescent light from the alignment mark to produce +/− first order diffracted beams;
- directing the +/− first order diffracted beams onto a combining element using the lens system, the diffracted light causing the ghost or spurious reflections through its interaction with the lens system;
- combining the +/− first order diffracted beams using the combining element;
- determining a position of the alignment mark based on an interference pattern generated from the combining step;
- generating a control signal based on the determined position;
- and
- positioning the substrate to properly align the substrate to receive a subsequent pattern based on the control signal,
- wherein the control signal generated from positioning the substrate is used to substantially reduce effect of the ghost or spurious reflections during receipt of the subsequent pattern by the substrate.
8 more elements
A system, comprising:
- a superluminescent device (SLD) configured to transmit a light beam;
- a lens system configured to direct the light beam to be diffracted from the alignment mark on a wafer, the diffracted light causing ghost or spurious reflections through its interaction with the lens system;
- an interferometer configured to use the diffracted light to determine a position of the alignment mark to produce a control signal related to the determined position, wherein the interferometer is configured to determine the position of the alignment mark using an interference pattern;
- and
- a positioning system configured to align the substrate to receive a subsequent pattern based on the control signal,
- wherein the positioning system is configured to use the control signal to substantially eliminate effect of the ghost or spurious reflections during receipt of the subsequent pattern by the substrate.
3 more elements
An interferometric measuring device, comprising:
- a laser diode configured to generate a beam of radiation having a coherence length of about 0.1 to 0.5 mm and configured to direct the beam of radiation to reflect from a diffractive alignment target to form first and second beams that are out of phase with respect to each other and that interfere with each other to form an interferogram, an interference pattern, or interference fringes;
- and
- a sensor configured to receive the interferogram, the interference pattern, or the interference fringes and to generate an alignment signal therefrom,
- wherein the beams of radiation having the coherence length of about 0.1 to 0.5 mm provide for substantial elimination of effect of spurious or ghost reflections from optical elements within the system, the optical elements having widths greater than about 0.1 to 0.5 mm, to reduce unwanted additional beams, caused by the spurious or ghost reflections, from interfering with the interferogram, the interference pattern, or the interferometric fringes.
1 more element
Dependencies are inferred from the claim text.