Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device
AssigneeASML Netherlands B.V.
InventorsGerard van Engelen, Cornelis D. van Dijk, Johannes M. M. van Kimmenade, Jan van Eijk
Life of this patent
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Abstract
A positioning device with a drive unit with which an object table is displaceable over a guide which is fastened to a first frame thereof. A stationary part of the drive unit is fastened to a second frame thereof and dynamically isolated from the first frame while a reaction force of the object table arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.
Claims44
A positioning device with an object table and a drive unit by which the object table is displaceable over a guide parallel to at least an X-direction, which guide is fastened to a first frame of the positioning device while a stationary part of the drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame, wherein a reaction force exerted by the object table on the drive unit during operation and arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.
A lithographic device with a machine frame which, seen parallel to a vertical Z-direction, supports in that order a radiation source, a mask holder, a focusing system with a main axis directed parallel to the Z-direction, and a substrate holder which is displaceable perpendicularly to the Z-direction by means of a positioning device, the positioning device of the substrate holder, including an object table and a drive unit by which the object table is displaceable over a guide parallel to at least an X-direction, which guide is fastened to a first frame of the positioning device while a stationary part of the drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame, wherein the first frame of the positioning device of the substrate holder belongs to the machine frame of the lithographic device, while the second frame of the positioning device of the substrate holder belongs to a force frame of the lithographic device which is dynamically isolated from the machine frame;
- and wherein a reaction force exerted by the object table on the drive unit during operation and arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.
A lithographic device with a machine frame which, seen parallel to a vertical Z-direction, supports in that order a radiation source, a mask holder which is displaceable perpendicularly to the Z-direction by means of a positioning device, a focusing system with a main axis directed parallel to the Z-direction, and a substrate holder which is displaceable perpendicularly to the Z-direction by means of a further positioning device, the positioning device of the mask holder including an object table and a drive unit by which the object table is displaceable over a guide parallel to at least an X-direction, which guide is fastened to a first frame of the positioning device while a stationary part of the drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame, wherein the first frame of the positioning device of the mask holder belongs to the machine frame of the lithographic device, while the second frame of the positioning device of the mask holder belongs to a force frame of the lithographic device which is dynamically isolated from the machine frame;
- and wherein a reaction force exerted by the object table on the drive unit during operation and arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.
A lithographic device with a machine frame which, seen parallel to a vertical Z-direction, supports in that order a radiation source, a mask holder, a focusing system with a main axis directed parallel to the Z-direction, and a substrate holder which is displaceable perpendicularly to the Z-direction by means of a positioning device, the positioning device of the substrate holder, including a first object table and a first drive unit by which the first object table is displaceable over a guide parallel to at least an X-direction, which guide is fastened to a first frame of the positioning device while a stationary part of the first drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame, wherein the first frame of the positioning device of the substrate holder belongs to the machine frame of the lithographic device, while the second frame of the positioning device of the substrate holder belongs to a force frame of the lithographic device which is dynamically isolated from the machine frame by a plurality of dynamic isolators, each dynamic isolator comprising a force actuator and a pneumatic spring;
- and wherein a reaction force exerted by the first object table on the first drive unit during operation and arising from a driving force exerted by the first drive unit on the first object table is transmittable exclusively into the second frame, and wherein the mask holder is displaceable perpendicularly to the Z-direction by means of a mask holder positioning device with a second object table and a second drive unit by which the second object table is displaceable over a guide parallel to at least an X-direction, which guide is fastened to a first frame of the mask holder positioning device while a stationary part of the second drive unit is fastened to a second frame of the mask holder positioning device which is dynamically isolated from the first frame thereof, wherein a reaction force exerted by the second object table on the second drive unit during operation and arising from a driving force exerted by the second drive unit on the second object table is transmittable exclusively into the second frame, wherein the first frame of the positioning device of the mask holder belongs to the machine frame of the lithographic device, while the second frame of the positioning device of the mask holder belongs to the force frame of the lithographic device.
A positioning device with:
- an object table;
- and
- a drive unit by which the object table is displaceable over a guide parallel to at least an X-direction, which guide is fastened to a first frame of the positioning device while a stationary part of the drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame by a plurality of dynamic isolators, each dynamic isolator comprising a force actuator and a pneumatic spring, wherein a reaction force exerted by the object table on the drive unit during operation and arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame.
A positioning device with:
- an object table;
- and
- a drive unit by which the object table is displaceable over a guide parallel to at least an X-direction, which guide is fastened to a first frame of the positioning device while a stationary part of the drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame, wherein a reaction force exerted by the object table on the drive unit during operation and arising from a driving force exerted by the drive unit on the object table is transmittable exclusively into the second frame,
- wherein the second frame comprises a base portion and a vertical column, and the base portion supports the first frame, and
- wherein the vertical column is mounted to the base portion independently of the first frame, and
- wherein the object table is a mask table for holding a mask and the stationary part of the drive unit is fastened to the vertical column.
A positioning device with:
- a first object table, and a first drive unit by which the first object table is displaceable over a guide parallel to at least an X-direction, which guide is fastened to a first frame of the positioning device while a stationary part of the first drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame by a plurality of dynamic isolators, each dynamic isolator comprising a force actuator and a pneumatic spring, wherein a reaction force exerted by the first object table on the first drive unit during operation and arising from a driving force exerted by the first drive unit on the first object table is transmittable exclusively into the second frame;
- and a second object table, and a second drive unit by which the second object table is displaceable over a guide parallel to at least an X-direction, which guide is fastened to a first frame of the positioning device while a stationary part of the second drive unit is fastened to a second frame of the positioning device which is dynamically isolated from the first frame and wherein a reaction force exerted by the second object table on the second drive unit during operation and arising from a driving force exerted by the second drive unit on the second object table is transmittable exclusively into the second frame.
Dependencies are inferred from the claim text.