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US RE40,211 E1Granted
Diazodisulfones
AssigneeWako Pure Chemical Industries, Ltd.
InventorsFumiyoshi Urano, Masaaki Nakahata, Hirotoshi Fujie, Keiji Oono
Life of this patent
Estimating the term…
Abstract
wherein R1 is a C3-8 branched or cyclic alkyl group, and R2 is a C1-8 straight-chain, branched or cyclic alkyl group, is effective as a photoacid generator when used in a photoresist material for light of 300 nm or less.
Claims7
A diazodisulfone compound of the formula:
- wherein R1 is a branched or cyclic alkyl group having 3 to 8 carbon atoms;
- and R2 is a straight-chain, branched or cyclic alkyl group having 1 to 8 carbon atoms.
A diazodisulfone compound of the formula:
- wherein R1 is a branched or cyclic alkyl group having 3 to 8 carbon atoms;
- and R2 is a branched or cyclic alkyl group having 3 to 8 carbon atoms.
Dependencies are inferred from the claim text.