Scanning force microscope having aligning and adjusting means

[2. An apparatus as recited in claim 1 wherein said means for aligning said optical deflection detection system comprises a mirror in said deflection detection system's optical beam's path.]

[3. An apparatus as recited in claim 2 wherein said mirror is situated at approximately the rotational center of a rotatable holder.]

[4. An apparatus as recited in claim 3 wherein said rotatable holder is a sphere having a cut away portion and

• wherein said mirror is mounted within said cut away portion.]

[6. An apparatus as recited in claim 5 wherein said first arm has a first zone for kinematic mounting and wherein said second arm has a second zone for kinematic mounting.]

[8. An apparatus as recited in claim 7 wherein said first position means for positioning said holder is a conical contact zone.]

[9. An apparatus as recited in claim 7 wherein said adjustment means comprises at least one adjustment screw.]

[11. An apparatus as recited in claim 10 wherein said means for positioning said sample holder relative to said probe comprises a feedback arrangement wherein said detector is a light position sensitive detector which provides feedback information regarding deflection of said probe relative to said sample to a control system, such control system involving a servo loop which adjusts the position of said sample holder relative to said sensor head according to said feedback information.]

[12. An apparatus as recited in claim 1 wherein said means for adjustably situating said sensor head relative to said base comprises a movable stage.]

[13. An apparatus as recited in claim 12 wherein said movable stage is a stage kinematic mount to said base.]

[14. An apparatus as recited in claim 13 wherein said stage kinematic mount comprises:

• a third element having a first contact zone, a second contact zone and a third contact zone, each one of said contact zones positioned at one of the corners of a triangle superimposed on said first element, such third element incorporated into said top portion and facing said apparatus base portion;
• and
• a fourth element having approach screws being associated with at least one of said contact zones, such fourth element being incorporated into said apparatus base portion and facing said top portion.]

[15. An apparatus as recited in claim 14 further comprising second position adjustment means for adjusting the position of said sensor head relative to said base.]

[16. An apparatus as recited in claim 15 wherein said second position adjustment means comprises screw means incorporated into said sensor head.]

[18. An apparatus as recited in claim 17 further comprising means for aligning said optical deflection detection device within said sensor head.]

[19. An apparatus as recited in claim 17 wherein said means for positioning said sample holder relative to said probe comprises a feedback arrangement wherein said detector is a light position sensitive detector which provides feedback information regarding deflection of said probe relative to said sample to a control system, such control system involving a servo loop which adjusts the position of said sample holder relative to said sensor head according to said feedback information.]

[20. A scanning probe microscope apparatus having a sample holder positioned relative to a probe, such positioning being monitored by an optical deflection detection device, comprising:

• a sensor head having a top portion, such sensor head for housing said probe and said optical deflection detection device and a base portion for housing said sample holder;
• and
• means for aligning said optical deflection detection device within said sensor head which allows an unobstructed view of the vicinity of the sample and the probe from a position above the sample and in a direction approximately perpendicular to the plane of lateral scanning of the sample.]

[21. An apparatus as recited in claim 20 wherein said means for aligning said optical deflection detection system comprises a mirror in said deflection detection system's optical beam's path.]

[22. An apparatus as recited in claim 21 wherein said mirror is situated at

• approximately the rotational center of a rotatable holder.]

[23. An apparatus as recited in claim 22 wherein said rotatable holder is a sphere having a cut away portion and wherein said mirror is mounted within said cut away portion.]

[25. An apparatus as recited in claim 24 wherein said first arm has a first zone for kinematic mounting and wherein said second arm has a second zone for kinematic mounting.]

[27. An apparatus as recited in claim 26 wherein said position means for positioning said holder is a conical contact zone.]

[28. An apparatus as recited in claim 26 wherein said adjustment means comprises at least one adjustment screw.]

[30. An apparatus as recited in claim 29 wherein said stage kinematic mount comprises:

• a sensor head element incorporated into said sensor head and facing said apparatus base portion, such element having a first contact zone on a moveable first contact portion, a second contact zone on a moveable second contact portion and a third contact zone, each one of said contact zones positioned at one of the corners of a triangle superimposed on said element;
• and
• a base element incorporated into said apparatus base portion and facing said sensor head element, such element having approach screws associated with at least one of said contact zones.]

[31. An apparatus as recited in claim 30 further comprising position adjustment means for adjusting the position at least one of said moveable contact portions relative to said sensor head.]

[32. An apparatus as recited in claim 31 wherein said position adjustment means comprises screw means incorporated into said sensor head.]

[33. An apparatus as recited in claim 30 wherein said first contact zone is a slot and said second contact zone is a

• cone.]

A scanning probe microscope according to claim 58 wherein the sensor head further includes a mirror for directing

• light emitted by the light source to the probe.

A scanning probe microscope according to claim 58, the light source being positioned vertically above and to one side of the probe.

A scanning probe microscope according to claim 58, the scanning probe microscope further including a positioning member for positioning the sample holder relative to the probe. A scanning probe microscope according to claim 58 wherein there are no physical obstructions between the probe and the space that prevent visual observation of the probe from the space substantially

• vertically above the probe.

A scanning probe microscope according to claim 58 wherein the sensor head mount is a stage kinematic mount.