# US RE34,741 E · Electrode structure for capacitance-type measurement transducers > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US RE34,741 E - Document ID: USRE34741E - Status: Granted - Kind: E - Application number: 07/950,316 - Filed: 1992-09-24 - Granted: 1994-09-27 - Earliest claimed: 1987-03-26 - Assignees: Mitutoyo Corporation - Inventors: Mils I. Andermo - Web page: https://patentgrep.com/patent/USRE34741E ## Abstract A capacitance-type measuring apparatus includes first and second support members which are movable with respect to one another along a measurement axis; a first electrode array and a second electrode disposed on the first support member; and a third electrode array disposed on the second support member and capacitively coupling the first electrode array and second electrode for transmission of a signal between the first electrode array and second electrode through the third electrode array. One of the first electrode array or the second electrode is formed to have end portions configured such that the degree of coupling between the first electrode array and second electrode through the third electrode array decreases linearly along the extent of each end portion relative to the measurement axis. This configuration permits improved measurement accuracies by reducing the effects of tilt between the first and second support members which changes the spacing between such members along the axis of measurement. ## Claims ### Claim 1 A transducer comprising: first and second support members, said support members being relatively displaceable with respect to each other, and at least one of said support members being displaceable relative to a measurement axis; first electrode means disposed on said first support member, and second electrode means disposed on said second support member and capacitively coupled to said first electrode means; said first and second electrode means each having an elongate configuration extending in the direction of the measurement axis, and one of said first and second electrode means having two end portions configured such that the degree of coupling between said first and second electrode means decreases linearly relative to the measurement axis along the extent of each end portion, and such that the respective directions of the decrease in the degree of coupling for said two end members are opposite to each other, so that the effect of tilt between said first and second support members on a set of signals transferred between said first and second electrodes is reduced. ### Claim 2 (depends on 1) The reducer of claim 1 wherein said one of said first and second electrode means comprises three portions: a first rectangularly-shaped portion; and second and third end portions extending from opposite ends of said rectangular portion and constituting said two end portions; said second and third end portions having complementary configurations such that the combined per phase effect of said second and third end portions on multiple phase signals transmitted between said first and second electrode means when there is no tilt between said first and second support members is substantially the same as would be provided by rectangularly-shaped end portions of the same length. ### Claim 3 (depends on 2) The transducer of claim 2 wherein said second and third end portions each have a triangular shape which is symmetrical with respect to a center line of said one of said first and second electrode means. ### Claim 4 (depends on 1) The transducer of claim 1 wherein said first electrode means has a shorter length in the measurement axis direction than said second electrode means and said first electrode means constitutes said one of said first and second electrode means. ### Claim 5 (depends on 1) The transducer of claim 1 wherein said first and second electrode means respectively comprise arrays of discrete first and second electrodes and said first electrodes are arranged in a periodic fashion so as to constitute successive groups of N adjacent electrodes, where N is an integer number greater than one, and said groups each have a wavelength Lt; and said two end portions each has a length in the measurement axis direction substantially equal to an integer number of wavelengths Lt. ### Claim 6 (depends on 5) The transducer of claim 5 wherein said first electrode means has a shorter length in the measurement axis than direction said second electrode means and said first electrode means constitutes said one of said first and second electrode means. ### Claim 7 (depends on 6) The transducer of claim 6 wherein the length of said first electrode means is substantially equal to an integer number of wavelengths Lt. ### Claim 8 (depends on 1) The transducer of claim 1 wherein said first and second electrode means respectively comprise arrays of discrete electrodes, each of said electrodes has a length and a width relative to the measurement axis; and the lengths and/or widths of the electrodes comprising said two end portions progressively taper in size so as to obtain said linearly decreasing degree of coupling. ### Claim 9 (depends on 8) The transducer of claim 8 wherein said electrodes have a rectangular shape and said progressive taper is linear. ### Claim 10 (depends on 8) The transducer of claim 8 wherein said first electrode means: constitutes said one of said first and second electrode means; has a shorter length relative to the measurement axis than said second electrode means; and comprises three portions: a first rectangularly-shaped portion, and second and third end portions extending from opposite ends of said rectangularly-shaped portion and constituting said two end portions. ### Claim 11 (depends on 10) Transducer of claim 10 wherein the electrodes of said first electrode means are arranged in a periodic fashion so as to constitute successive groups of N adjacent electrodes, where N is an integer number greater than one, and said groups each have a wavelength Lt; the length of said first electrode means is substantially equal to a first integer number of wavelengths Lt; and said second and third end portions have a length substantially equal to a second integer number of wavelengths Lt, said second integer number being less than said first integer number. ### Claim 12 A transducer comprising; first and second support members, said support members being relatively displaceable with respect to each other, and at least one of said support members being displaceable relative to a measurement axis; first electrode means and second electrode means disposed on said first support member; third electrode means disposed on said second support means and capacitively coupling said first and second electrode means for transmission of signals between said first and second electrode means through said third electrode means; and said first and second electrode means each having an elongate configuration extending in the direction of the measurement axis, and one of said first electrode and said second electrode means having two end portions configured such that the degree of coupling between said first and second electrode means, through said third electrode means, decreases linearly along the extent of each end portion relative to the measurement axis and such that the respective directions of the decrease in the degree of coupling for said two end portions are opposite to each other, so that the effect of tilt between said first and second support members on a set of signals transferred between said first and second electrode means, through said third electrode means, is reduced. ### Claim 13 (depends on 12) The transducer of claim 12 wherein said one of said first and second electrode means comprises three portions: a first rectangularly-shaped portion; and second and third end portions extending from opposite ends of said rectangularly-shaped portion and constituting said two end portions, said second and third end portions having complementary configurations such that the combined per phase effect of said second and third end portions on multiple phase signals transmitted between said first and second electrode means through said third electrode means when there is no tilt between said first and second support members is substantially the same as would be provided by rectangularly-shaped end portions of the same length. ### Claim 14 (depends on 13) The transducer of claim 13 wherein said first electrode means comprises an array of discrete first electrodes arranged in a periodic fashion so as to constitute successive groups of N adjacent electrodes, where N is an integer number greater than one, and said groups each have a wavelength Lt; and said second electrode means includes said second and third end portions and has a length in the measurement axis direction less than the length of said first electrode means and substantially equal to an integer number of wavelengths Lt. ### Claim 15 (depends on 14) The transducer of claim 14 wherein said second and third, end portions each have a length in the measurement axis direction substantially equal to an integer number of wavelengths Lt. ### Claim 16 (depends on 14) The transducer of claim 14 wherein said second and third end portions each have an effective width which progressively tapers relative to the measurement axis so as to obtain said linearly decreasing degree of coupling. ### Claim 17 (depends on 16) The transducer of claim 16 wherein the taper of the respective effective widths is linear. ### Claim 18 (depends on 17) The transducer of claim 17 wherein said second and third end portions each have a triangular shape which is symmetrical with respect to a center line of said second electrode means. ### Claim 19 (depends on 13) The transducer of claim 13 wherein said first electrode means: comprises an array of discrete first electrodes arranged in a periodic fashion so as to constitute successive groups of N adjacent electrodes, where N is an integer number greater than one, and said groups each have a wavelength Lt; constitutes said one of said first and second electrode means comprising three portions; and has a length in the measurement axis direction less than the length of said second electrode means and substantially equal to an integer number of wavelengths Lt. ### Claim 20 (depends on 19) The transducer of claim 19 wherein said second and third end portions each have a length in the measurement axis direction substantially equal to an integer number of wavelengths. ### Claim 21 (depends on 20) The transducer of claim 20 wherein said second electrode means has a rectangular shape. ### Claim 22 (depends on 21) The transducer of claim 21 wherein said first electrodes of said first electrode means each have a length and a width relative to the measurement axis; and the lengths and/or the widths of the first electrodes of said second and third end portions progressively taper in size so as to obtain said linearly decreasing degree of coupling. ### Claim 23 (depends on 22) The transducer of claim 22 wherein said third electrode means comprises an array of discrete third electrodes; said third electrodes have a uniform rectangular shape; and said progressive taper is linear. ### Claim 24 A transducer comprising: first and second support members which are relatively displaceable with respect to each other, and at least one of which is displaceable relative to a measurement axis; an array of first transmitter electrodes disposed on the first support member in alignment with the measurement axis; an array of first receiver electrodes disposed on the second support member in alignment with the measurement axis and such that different portions of the first receiver electrode array are capacitively coupled with the first transmitter electrode array in dependence on the relative positions of said support members; an array of second transmitter electrodes disposed on the second support member in relative alignment with the first receiver electrode array and each of the second transmitter electrodes being electrically connected to a corresponding one of said first receiver electrodes; and detector electrode means disposed on the first support member in relative alignment with the first transmitter electrode array and capacitively coupled with the second transmitter electrode array in dependence on the relative position of said support members, one of said first transmitter electrode array and said detector electrode means being configured to have two end portions configured such that the degree of coupling between said first transmitter electrode array and said detector electrode means through said first receiver and second transmitter electrode arrays decreases linearly along the extent of each end portion relative to the measurement axis and such that the respective directions of the decrease in the degree of coupling for said two end members are opposite to each other, so that the effect of tilt between said first and second support members on a set of signals transferred between said first transmitter electrode array and said detector electrode means is reduced. ### Claim 25 (depends on 24) The transducer of claim 24 wherein a predetermined number of said first transmitter electrodes defines a transmitter wavelength and said first transmitter electrode array forms an envelope having a first rectangular portion and second and third end portions extending from opposite ends of said rectangular portion, said envelope having a length in the measurement axis direction less than the length of said detector electrode means and substantially equal to an integer number of transmitter wavelengths. ### Claim 26 (depends on 25) The transducer of claim 25 wherein said detector electrode means has a rectangular configuration and each of said second and third end portions of said envelope extends over a distance in the measurement axis direction substantially equal to an integer number of transmitter wavelengths. ### Claim 27 (depends on 26) The transducer of claim 26 wherein said first transmitter electrodes each have a length and a width relative to the measurement axis; and the lengths and/or the widths of the first transmitter electrodes of said second and third end portions progressively taper in size so as to obtain said linearly decreasing degree of coupling. ### Claim 28 (depends on 27) The transducer of claim 27 wherein said first receiver electrodes have a uniform rectangular shape; and said progressive taper is linear. ### Claim 29 (depends on 28) The transducer of claim 28 wherein only the lengths of the first transmitter electrodes of said second and third end portions progressively taper; and said second and third end portions each have a triangular shape which is symmetrical with respect to a center line of said first transmitter electrode array. ### Claim 30 (depends on 24) The transducer of claim 24 wherein a predetermined number of said first transmitter electrodes defines a transmitter wavelength and said detector electrode means has an elongate configuration including a first rectangular portion and second and third end portions extending from opposite ends of said rectangular portion and each having an effective width relative to the measurement axis which tapers so as to obtain said linearly decreasing degree of coupling; said detector electrode means having a length in the measurement axis direction less than said first transmitter electrode array and substantially equal to an integer number of transmitter wavelengths. ### Claim 31 A transducer comprising: first and second support members disposed in opposed, spaced relation and movable relative to one another along an axis of measurement; first electrode array means disposed on said first support member along said measurement axis, said first electrode array means forming a rectangular envelope configuration having a predetermined length in the measurement axis direction; second electrode array means disposed on said second support member along said measurement axis such that different portions of said second electrode array means are capacitively coupled to said first electrode array means in response to relative movement of said first and second support members; and third electrode means disposed on said first support member along said measurement axis such that said third electrode means is capacitively coupled to different portions of said second electrode array means in response to relative movement of said first and second support members; said third electrode means having an elongate configuration with a length in the measurement axis direction less than the predetermined length of said first electrode array means envelope, and including a first rectangular portion and second and third end portions extending from opposite ends of said rectangular portion along said measurement axis and each having an effective width which progressively tapers along said measurement axis such that the degree of coupling between said first electrode array means and said third electrode means through said second electrode array means decreases linearly over said second and third end portions. ### Claim 32 (depends on 31) The transducer of claim 31 wherein said second and third tapered end portions each has a symmetrical triangular shape. ### Claim 33 (depends on 32) The transducer of claim 32 wherein said first electrode array means comprises first electrodes spaced from one another along the measurement axis such that successive groups of first electrodes are formed by equal numbers of adjacent first transmitter electrodes, said groups each having a wavelength Lt; and the length of said third electrode means in the measurement axis direction less than the predetermined length of said first electrode array means envelope and substantially equal to an integer number of wavelengths Lt. ### Claim 34 (depends on 33) The transducer of claim 33 wherein each of said second and third tapered end portions has a length in the measurement axis direction substantially equal to an integer number of wavelengths Lt. ### Claim 35 (depends on 33) The transducer of claim 33 wherein each of said tapered end portions has a length in the measurement axis direction substantially equal to one-half said wavelength. ### Claim 36 A transducer comprising: first and second support members disposed in opposed, spaced relation and movable relative to one another along an axis of measurement; first electrode array means disposed on said first support member along said measurement axis, said first electrode array means forming an envelope having an elongate configuration of predetermined length in the measurement axis direction and including a first rectangular portion and second and third end portions extending from opposite ends of said rectangular portion along said measurement axis; second electrode array means disposed on said second support member along said measurement axis such that different portions of said second electrode array means are capacitively coupled to said first electrode array means in response to relative movement of said first and second support members; and third electrode means disposed on said first support member along said measurement axis such that said third electrode means is capacitively coupled to different portions of said second electrode array means in response to relative movement of said first and second support members; said third electrode means having a rectangular configuration and said second and third end portions of said first electrode array means each being configured such that the degree of coupling between said first electrode array means and said third electrode means through said second electrode array means decreases linearly over said second and third end portions, and such that the respective directions of the decrease in the degree of coupling for said second and third end portions are opposite to each other, so that the effect of tilt between said first and third support members on a set of signals transferred between said first and third electrode means, through said second electrode means, is reduced. ### Claim 37 (depends on 36) The transducer of claim 36 wherein said second and third end portions each has a symmetrical triangular shape. ### Claim 38 (depends on 37) The transducer of claim 37 wherein said first electrode array means comprises first electrodes spaced from one another along the measurement axis such that successive groups of first electrodes are formed by equal numbers of adjacent first electronics, said groups each having a wavelength Lt, the length of said first electrode array means envelope in the measurement axis direction being less than the length of said third electrode means and substantially equal to an integer number of wavelengths Lt. ### Claim 39 (depends on 38) The transducer of claim 38 wherein each of said second and third end portions has a length in the measurement axis direction substantially equal to an integer number of wavelengths Lt. ### Claim 40 (depends on 38) The transducer of claim 38 wherein each of said second and third end portions has a length in the measurement axis direction substantially equal to one-half said wavelength Lt. ### Claim 41 A capacitance-type measurement transducer comprising: first and second support members, said support members being relatively displaceable with respect to each other, and at least one of said support members being displaceable relative to a measurement axis; first and second electrode structures disposed on said first support member; a third electrode structure disposed on said second support member and capacitively coupling said first and second electrode structures for signal transfer between said first and second electrode structures through said third electrode structure; said first and second electrode structures each having an elongate configuration extending in the direction of the measurement axis, and one of said first and second electrode structures having two end portions configured such that the degree of coupling between said first and second electrode structures, through said third electrode structure, decrease relative to the measurement axis along the extent of each end portion, and such that the respective directions of the decrease in the degree of coupling for said two end members are opposite to each other, so that the effect of tilt between said first and second support members on signal transfer between said first and second electrode structures is reduced. ### Claim 42 (depends on 41) The transducer of claim 41 wherein said one of said first and second electrode structures having said two end portions includes an elongate middle portion intermediate said two end portions. ### Claim 43 (depends on 41) The transducer of claim 41 wherein said first electrode structure comprises an array of discrete first electrodes, a continuous member constitutes said second electrode structure, and said third electrode structure an array of discrete third electrode elements. ### Claim 44 (depends on 41) The transducer of claim 41 further comprising signal generating means for applying at least one excitation signal to a first one of said first and second electrode structures; and signal processing means for providing an indication of position in response to output signal(s) received from a second one of said first and second electrode structures, said output signal(s) varying in accordance with a capacitance pattern which is created by said third electrode structure and said first or second electrode structure, and which changes as the relative positions of said support members change with respect to said measurement axis. ### Claim 45 (depends on 42) The transducer of claim 42 wherein said middle portion has a generally rectangular shape, and said two end portions each has a generally triangular shape which is symmetrical with respect to a center line of the corresponding electrode structure. ### Claim 46 (depends on 43) The transducer of claim 43 wherein said first electrodes are arranged in a periodic fashion so as to constitute successive groups of N adjacent electrodes, where N is an integer number greater than one, and said groups each has a wavelength Lt. ### Claim 47 (depends on 46) The transducer of claim 46 wherein said first electrode structure has a shorter length in the measurement axis direction than said third electrode structure and said first electrode structure constitutes said one of said first and second electrode structures. ### Claim 48 (depends on 47) The transducer of claim 47 wherein the length of said first electrode structure is substantially equal to a first integer number of wavelengths Lt. ### Claim 49 (depends on 47) The transducer of claim 47 wherein each of said first electrodes has a length and a width relative to the measurement axis; and the lengths and/or widths of the electrodes comprising said two end portions progressively taper in size so as to obtain said decreasing degree of coupling. ### Claim 50 (depends on 49) The transducer of claim 49 wherein said electrodes have a rectangular shape and said progressive taper is linear. ### Claim 51 (depends on 47) The transducer of claim 47 wherein said first electrode structure further comprises a rectangularly-shaped middle portion intermediate said two end portions. ### Claim 52 (depends on 48) The transducer of claim 48 wherein said two end portions each has a length in the measurement axis direction substantially equal to a second integer number of wavelengths Lt, said second integer number being less than said first integer number. ### Claim 53 (depends on 46) The transducer of claim 46 wherein said second electrode structure includes said two end portions and has a length in the measurement axis direction less than the length of said first electrode structure and substantially equal to an integer number of wavelengths Lt. ### Claim 54 (depends on 53) The transducer of claim 53 wherein said two end portions each has a length in the measurement axis direction substantially equal to an integer number of wavelengths Lt. ### Claim 55 (depends on 53) The transducer of claim 53 wherein said two end portions each has a length in the measurement axis direction substantially equal to one-half of said wavelength Lt. ### Claim 56 (depends on 53) The transducer of claim 53 wherein said two end portions each have an effective width which progressively tapers relative to the measurement axis so as to obtain said decreasing degree of coupling. ### Claim 57 (depends on 56) The transducer of claim 56 wherein the taper of the respective effective widths is linear. ### Claim 58 (depends on 57) The transducer of claim 57 wherein said end portions each has a triangular shape which is symmetrical with respect to a center line of said third electrode structure. ### Claim 59 (depends on 47) The transducer of claim 47 wherein said first electrode structure has a length in the measurement axis direction less than the length of said second electrode structure and substantially equal to an integer number of wavelengths Lt. ### Claim 60 (depends on 59) The transducer of claim 59 wherein said two end portions each has a length in the measurement axis direction substantially equal to an integer number of wavelengths Lt. ### Claim 61 (depends on 59) The transducer of claim 59 wherein said two end portions each has a length in the measurement axis direction substantially equal to one-half of said wavelength Lt. ### Claim 62 (depends on 60) The transducer of claim 60 wherein said second electrode structure has a rectangular shape. ### Claim 63 (depends on 62) The transducer of claim 62 wherein each of said first electrodes has a length and a width relative to the measurement axis; and the lengths and/or widths of the electrodes comprising said two end portions progressively taper in size so as to obtain said decreasing degree of coupling. ### Claim 64 (depends on 63) The transducer of claim 63 wherein said progressive taper is linear, and said third electrode structure comprises rectangular electrode portions. ### Claim 65 (depends on 44) The transducer of claim 44 wherein: said first electrode structure constitutes a first transmitter electrode structure; said third electrode structure comprises an array of first receiver electrodes disposed on the second support member in alignment with the measurement axis and such that different portions of the first receiver electrode array are capacitively coupled with the first electrode structure in dependence on the relative positions of said support members, and an array of second transmitter electrodes disposed on the second support member in relative alignment with the first receiver electrode array, with each of the second transmitter electrodes being electrically connected to a corresponding one of said first receiver electrodes; and said second electrode structure constitutes a detector electrode and is disposed on the first support member in relative alignment with the first transmitter electrode structure and so as to be capacitively coupled with the second transmitter electrode array in dependence on the relative position of said support members. ### Claim 66 (depends on 44) The transducer of claim 44 wherein: said first electrode structure constitutes detector-electrode structure; said third electrode structure comprises an array of first receiver electrodes disposed on the second support member in alignment with the measurement axis and such that different portions of the first receiver electrode array are capacitively coupled with the second electrode structure in dependence on the relative positions of said support members, and an array of second transmitter electrodes disposed on the second support member in relative alignment with the first receiver electrode array, with each of the second transmitter electrodes being electrically connected to a corresponding one of said first receiver electrodes; and said second electrode structure constitutes a first transmitter electrode structure and is disposed on the first support member in relative alignment with the detector electrode structure and so as to be capacitively coupled with the first receiver electrode array in dependence on the relative position of said support members. ### Claim 67 (depends on 41) The transducer of claim 41 wherein the degree of coupling between said first and second electrode structures decreased linearly along the extent of each end portion relative to the measurement axis, and said two end portions have complementary configurations such that the combined per phase effect of said end portions on multiple phase signals transmitted between said first and second electrode structures through said third electrode structure when there is no tilt between said first and second support members is substantially the same as would be provided by rectangularly-shaped end portions of the same length. ### Claim 68 A capacitance-type measurement transducer comprising: first and second support members, said support members being relatively displaceable with respect to each other, and at least one of said support members being displaceable relative to a measurement axis; a first electrode structure comprising an array of discrete first electrodes disposed on said first support member, and a second electrode structure comprising an array of discrete second electrodes disposed on said second support member and capacitively coupled to said first electrode structure; said first and second electrode structures each having an elongate configuration extending in the direction of the measurement axis, and one of said first and second electrode structures having two end portions configured such that the degree of coupling between said first and second electrode structures decreases relative to the measurement axis along the extent of each end portion, and such that the respective directions of the decrease in the degree of coupling for said two end portions are opposite to each other, so that the effect of tilt between said first and second support members on signal transfer between said first and second electrode structures is reduced. ### Claim 69 A capacitance-type measurement transducer comprising: first and second support members, said support members being relatively displaceable with respect to each other, and at least one of said support members being displaceable relative to a measurement axis; a first electrode structure disposed on said first support member, and a second electrode structure disposed on said second support member and capacitively coupled to said first electrode structure; said first and second electrode structures each having an elongate configuration extending in the direction of the measurement axis, and one of said first and second electrode structures having two end portions separated by an elongate middle portion, said end portions being configured such that the degree of coupling between said first and second electrode structures decreases relative to the measurement axis along the extent of each end portion, and such that the respective directions of the decrease in the degree of coupling for said two end portions are opposite to each other, so that the effect of tilt between said first and second support members on signal transfer between said first and second electrode structures is reduced and said middle portion being configured such that the degree of coupling between said first and second electrode structures does not progressively decrease over the extend of the middle portion. ### Claim 70 (depends on 69) The transducer of claim 69 wherein said first electrode structure comprises an array of discrete first electrodes, and said second electrode structure comprises an array of discrete second electrodes.