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US D973,609 S1Granted
Upper shield with showerhead for a process chamber
AssigneeApplied Materials, Inc.
InventorsSarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Tai Ming Boh, Kang Zhang, Yuichi Wada
Life of this patent
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Abstract
The abstract isn’t available for this document.
Claims1
The ornamental design for an upper shield with showerhead for a process chamber, as shown and described.