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US D889,596 S1Granted
Gas nozzle for substrate processing apparatus
AssigneeKokusai Electric Corporation
InventorsYusaku Okajima, Toru Kagaya, Hiroaki Hiramatsu, Shinya Ebata
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Abstract
The abstract isn’t available for this document.
Claims1
We claim the ornamental design for an gas nozzle for substrate processing apparatus, as shown (and described).