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US D655,682 S1Granted
Boat of wafer processing apparatus
AssigneeHitachi Kokusai Electric Inc.
InventorsYuji Takebayashi, Tatsuyuki Saito, Tetsuo Yamamoto, Tsutomu Kato, Satoshi Okada
Life of this patent
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Abstract
The abstract isn’t available for this document.
Claims1
The ornamental design for a boat of a wafer processing apparatus, as shown and described.