Back to results
US D404,016 SGranted
Heat retaining tube for use in a semiconductor wafer heat processing apparatus
AssigneeTokyo Electron Limited
InventorKatsutoshi Ishii
Life of this patent
Estimating the term…
Abstract
The abstract isn’t available for this document.
Claims1
I claim the ornamental design for heat retaining tube for use in a semiconductor wafer heat processing apparatus, as shown and described.