Back to results
US D403,334 SGranted
Shield and cover for target of sputter coating apparatus
AssigneeSemiconductor Equipment Technology
InventorsAndrew William Tudhope, David Bruce Jordan, Jose Luis Gonzalez
Life of this patent
Estimating the term…
Abstract
The abstract isn’t available for this document.
Claims1
The ornamental design for a shield and cover for target of sputter coating apparatus, as shown and described.