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US 9,997,611 B2Granted
Graphene wiring structure and method for manufacturing graphene wiring structure
AssigneeKabushiki Kaisha Toshiba
InventorsHisao Miyazaki, Tadashi Sakai, Masayuki Katagiri, Yuichi Yamazaki
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Abstract
A graphene wiring structure of an embodiment has a multilayered graphene having a plurality of planar graphene sheets laminated, and a first interlayer substance being a metal oxyhalide between the plurality of planar graphene sheets.
Claims18
A graphene wiring structure, comprising:
- a multilayered graphene having a plurality of planar graphene sheets laminated;
- a first interlayer substance being a metal oxyhalide between the plurality of planar graphene sheets;
- a substrate;
- and
- a metal portion on the substrate,
- wherein one end of each of the planar graphene sheets is connected to the metal portion.
3 more elements
Dependencies are inferred from the claim text.