Fiber-optic temperature and flow sensor system and methods
AssigneeNUtech Ventures
InventorsMing Han, Guigen Liu, Weilin Hou
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AssigneeNUtech Ventures
InventorsMing Han, Guigen Liu, Weilin Hou
Estimating the term…
A fiber optic sensor, a process for utilizing a fiber optic sensor, and a process for fabricating a fiber optic sensor are described, where a double-side-polished silicon pillar is attached to an optical fiber tip and forms a Fabry-Pérot cavity. In an implementation, a fiber optic sensor in accordance with an exemplary embodiment includes an optical fiber configured to be coupled to a light source and a spectrometer; and a single silicon layer or multiple silicon layers disposed on an end face of the optical fiber, where each of the silicon layer(s) defines a Fabry-Pérot interferometer, and where the sensor head reflects light from the light source to the spectrometer. In some implementations, the fiber optic sensor may include the light source coupled to the optical fiber; a spectrometer coupled to the optical fiber; and a controller coupled to the high speed spectrometer.
A fiber optic sensor, comprising:
A process for fabricating a fiber optic sensor, comprising:
A fiber optic sensor, comprising:
A fiber optic sensor, comprising:
Dependencies are inferred from the claim text.