Methods and systems for ultra-high quality gated hybrid devices and sensors

Abstract

High electron mobility leads to better device performance and today is achieved by fabricating “gated devices” within a high-mobility two-dimensional electron gas (2DEG. However, the fabrication techniques used to form these devices lead to rapid degradation of the 2DEG quality which then can limits the mobility of the electronic devices. Accordingly, it would be beneficial to provide a process/technique which circumvents this processing and 2DEG layer damage. By exploiting a flip-chip methodology such damaging processing steps are separated to a second die/wafer which is then coupled to the 2DEG wafer. Extensions of the technique with two or more different semiconductor materials or material systems may be employed in conjunction with one or more electronic circuits to provide 2DEG enabled circuits in 2D and/or 3D stacked configurations. Further semiconductor materials providing EG elements may incorporate one or more of 2DEG, 1DEG, and “zero” DEG structures.

Dependencies are inferred from the claim text.