Low energy electron microscopy
AssigneesTsinghua University, Hon Hai Precision Industry Co., Ltd.
InventorsPeng Liu, Wei Zhao, Xiao-Yang Lin, Duan-Liang Zhou, Chun-Hai Zhang, Kai-Li Jiang, Shou-Shan Fan
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Abstract
The disclosure relates to a low energy electron microscopy. The electron microscopy includes a vacuum chamber; an electron gun used to emit electron beam; a diffraction chamber; an imaging device; a sample holder used to fix two-dimensional nanomaterial sample; a vacuum pumping device; and a control computer. The electron beam transmits the sample to form a transmission electron beam and diffraction electron beam. The control computer includes a switching module to switch the work mode between a large beam spot diffraction imaging mode and small beam spot diffraction imaging mode.
Claims10
A transmission-type low energy electron microscopy, comprising:
- a vacuum chamber;
- an electron gun located in the vacuum chamber and configured to emit an electron beam;
- a diffraction chamber in communication with the vacuum chamber;
- an imaging device located in the diffraction chamber;
- a core column connected to the diffraction chamber;
- a vacuum pumping device connected to the vacuum chamber;
- a sample holder configured to fix a two-dimensional nanomaterial sample so that the electron beam passes through the two-dimensional nanomaterial sample and enters the diffraction chamber to form a diffraction electron beam and a transmission electron beam to form an image on the imaging device;
- and
- a control computer, wherein the control computer comprises a switching module configured to switch the transmission-type low energy electron microscopy between a large beam spot diffraction imaging mode and a small beam spot diffraction imaging mode;
- in the large beam spot diffraction imaging mode, the electron beam is larger than the two-dimensional nanomaterial sample and used to irradiate entire surface of the two-dimensional nanomaterial sample so that a first diffraction imaging of the entire two-dimensional nanomaterial sample is obtained;
- and in the small beam spot diffraction imaging mode, the electron beam is smaller than the two-dimensional nanomaterial sample and used to irradiate partial surface or scan entire surface of the two-dimensional nanomaterial sample so that a second diffraction imaging, of part of the two-dimensional nanomaterial sample, is obtained.
Dependencies are inferred from the claim text.