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US 9,987,747 B2Granted
Stocker for receiving cassettes and method of teaching a stocker robot disposed therein
AssigneeSemes Co., Ltd.
InventorsGui Jin Hwang, Yeon Kyu Jeong, Young Woo Kim
Life of this patent
Estimating the term…
Abstract
Disclosed is a stocker for receiving a cassette. The stocker includes a shelf for receiving a cassette, a stocker robot, a teaching jig, and a teaching unit. The stocker robot includes a robot arm configured to load the cassette in the shelf and to unload the cassette from the shelf. The teaching jig is disposed in the shelf to teach the stocker robot. The teaching unit is disposed on the robot arm to acquire information for teaching the stocker robot using the teaching jig.
Claims16
A stocker for receiving a cassette comprising:
- a shelf configured to receive a cassette;
- a stocker robot including a robot arm configured to load the cassette in the shelf and to unload the cassette from the shelf;
- a teaching jig disposed in the shelf configured to teach the stocker robot;
- a teaching unit disposed on the robot arm configured to identify the teaching jig and to acquire information for teaching the stocker robot using the identified teaching jig;
- and
- a second teaching jig disposed in the shelf configured to teach the robot arm.
3 more elements
A method of teaching a stocker robot, comprising:
- moving the stocker robot to a front position of a shelf for receiving a cassette using a predetermined position coordinate;
- acquiring information for teaching the stocker robot from a teaching jig disposed in the shelf using a teaching unit disposed on a robot arm of the stocker robot;
- compensating the predetermined position coordinate using the acquired information;
- moving the robot arm into the shelf using a predetermined second position coordinate;
- and
- measuring a distance to a second teaching jig disposed in the shelf using a second teaching unit disposed on the robot arm.
3 more elements
Dependencies are inferred from the claim text.